干涉測距模塊

Introduceaboutlasertracker’sperformanceevaluation（現(xiàn)有激光跟蹤儀評定方法）Methodforhowtocalibratealasertracker’sangle&distance（激光跟蹤儀測角和測距精度的校準方法）c（雙軸激光跟蹤儀校準裝置）

4DesignplansforLasertrackercalibrationdevice（4種跟蹤儀校準裝置的設計方案）Contents內容1Lasertracker’sperformanceevaluationCalibratingIn-lab實驗室校準Evaluatingin-site現(xiàn)場檢查Evaluatingin-sitemeanstochecktheperformanceoflasertrackermeasuringapointinworkshopenvironment.檢查跟蹤儀在某種特定的使用環(huán)境下所能達到的綜合測量能力（如空間坐標測量能力、空間測長測量能力）。Twopathstolasertracker’sperformanceevaluation(激光跟蹤儀的兩種評定方式)CalibratingIn-labmeanstochecktheperformanceoflasertracker’sangleindexesInterferometer,laserdistancemeter,retro-reflector,environmentsensoretc.inastandardenvironmentlaboratoryandverifytheirmaximumpermissionerror(MPE).檢查的是集成在跟蹤儀內部的雙向測角編碼器、激光干涉儀、激光測距儀、目標跟蹤傳感器及目標反射鏡、環(huán)境傳感器等關鍵部件的技術指標是否滿足生產商提供的指標要求，即檢查出設備的最佳測量能力。Lasertracker（linearslider）whosestandardmagnitudeisreferencelength;（激光干涉儀（直線導軌）--標準量是參考長度）Lineartargetarraywhosestandardmagnitudeisthedistancebetweentargetcentercoordinatesandthetargetitself.（直線目標陣列--標準量是目標中心點坐標和目標之間距離）1Lasertracker’scalibrationmethod現(xiàn)有激光跟蹤儀校準方法CalibratingIn-lab

實驗室校準CalibratingIn-site

現(xiàn)場校準Fixedlengthscalewhosestandardmagnitudeisreferencelength.（定長標尺--標準量是參考長度）Fixedtargetwhosestandardmagnitudeisspacecoordinates.（固定目標--標準量是空間坐標）LaserTracker’scommonlyusedcalibrationequipment激光跟蹤儀常用的校準設備序號單位建立時間測量范圍備注1中航304所(AVIC304Institute)1999水平軸36m俯仰軸2.1mhorizontalaxis36mpitchingaxis2.1m水平軸、俯仰軸獨立Independenthorizontalaxisandpitchingaxis2中國計量院2010水平軸80m俯仰軸1.2m俯仰軸位于水平軸上pitchingaxisabovehorizontalaxis3成都飛機制造公司2011水平軸25m俯仰軸1.0m俯仰軸位于水平軸上4西安飛機制造公司2012水平軸25m僅有水平軸5航天計量測試技術所2013水平軸10m俯仰軸2.0m水平軸、俯仰軸獨立Atpresentthedomesticmaincalibrationmethodoflasertrackerisdouble-axiscalibrationmethod:Horizontalaxisisusedtocalibratehorizontalangleoftracker,built-ininterferometerandrangefinder.Verticalaxisisusedtocalibratepitchangleoftracker.Unitswhichhavetheabilitytocarryoutcalibrating

In-labindomesticareshowninTable1.目前國內激光跟蹤儀的校準方法基本上采用雙軸校準法：水平軸--校準跟蹤儀的水平角和內置干涉儀及測距儀垂直軸--校準跟蹤儀的俯仰角。目前能夠實現(xiàn)跟蹤儀實驗室校準的典型單位見表1。1Lasertracker’scalibrationmethod現(xiàn)有激光跟蹤儀校準方法2

Due-axisLasertrackercalibrationprinciple激光跟蹤儀雙軸校準原理Basicidea--Adjustrelativepositionbetweenthelasertrackerandrailinordertoseparateindividualerrorsofsystem.基本思路--調整激光跟蹤儀與導軌的相對位置分離出系統(tǒng)的單項誤差。Placedatoneendofthehorizontalguiderail放置在水平導軌一端Remaintracker'sazimuthandpitchangleunchanged，andcalibrateitsrangingerror.（跟蹤儀的方位角和俯仰角保持不變，校準跟蹤儀測距誤差。）Remaintracker'spitchangleunchanged，andcalibrateitsazimuthanglemeasurementerror.（跟蹤儀俯仰角保持不變時，校準跟蹤儀方位角的測角誤差。）Remaintracker'sazimuthunchanged，andcalibrateitspitchanglemeasurementerror.（跟蹤儀方位角保持不變，校準跟蹤儀俯仰角的測角誤差。）Placedinfrontofthehorizontalguiderail放置在水平導軌前方Placedinfrontoftheverticleguiderail放置在垂直導軌前方BasicPrinciple--Placedtrackermirrorandinterferometermirroronthesameworkbench,whentheworkbenchismovedacertaindistance,displacementmeasuredbytheinterferometer-L0andcoordinatesoftwotargetpointsmeasuredbytracker--P1,P2canbeobtained.Thenthedistancebetweenthe2points(L)canbecalculatedbythefollowingformula:inwhichAmeansanglebetween2targetpoints.基本原理--跟蹤儀的反射鏡與干涉儀的反射鏡放置在同一工作臺上，當工作臺移動一定距離后，得到干涉儀的位移量L0和跟蹤儀的兩點坐標P1、P2，它們之間的距離為L,其中A為兩目標點之間的交角。2

Due-axisLasertrackercalibrationprinciple激光跟蹤儀雙軸校準原理Remaintracker'sazimuthandpitchangleunchanged當方位角和俯仰角不變時Ignoredanglemeasurementimpact,rangingerroroftrackeris

忽略測角誤差影響，跟蹤儀的測距誤差Ignoredrangingandpitchimpact,azimuthmeasurementerroroftrackeris忽略測距和俯仰角的影響，跟蹤儀的方位角測角誤差Remainpitchangleunchanged，andchangeazimuth當俯仰角不變，方位角改變時Remainazimuthunchang-ed，andchangepitchangle.當方位角不變俯仰角改變時Ignoredrangingandazimuthimpact,pitchanglemeasurementerroroftrackeris忽略測距和方位角的影響，跟蹤儀的俯仰角測角誤差2

Due-axisLasertrackercalibrationprinciple激光跟蹤儀雙軸校準原理3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置(opratingstroke)＞10m工作行程(straightness)≤0.15mm直線度(uncertaintyofmeasurement)測量不確定度(2.0+0.5L)μm,k=2,(workingspeed)＞500mm/s運動速度(opratingstroke)＞2.0m工作行程(straightness)≤0.05mm直線度(uncertaintyofmeasurement)測量不確定度

（2.0+0.5L)μm,k=2,(workingspeed)＞100mm/s運動速度Verticalaxis垂直軸Horizontalaxis水平軸Technicalparameters技術參數HorizontalXaxis:10mprecisionlinearguiderail,lengthmeasuringsystemVerticalYaxis:2mlinearguidesystem,lengthmeasuringsystem4environmentalcompensationsystem，dual-axismotioncontrollingsystem,Analysisingsoftwareplatform,etc.(水平X軸：10m精密直線導軌、長度測量系統(tǒng)垂直Y軸：2m直線導軌系統(tǒng)、長度測量系統(tǒng)四路環(huán)境補償系統(tǒng)雙軸運動控制系統(tǒng)分析處理軟件應用平臺等組成。)Regardlaserinterferometerasmeasurementstandardofthedistancebetweentwotargetpoints,placetrackermirrorandinterferometermirroronworkbench,whichismotor-drivenandmovealonglinearguiderail.Thedeviationbetweendistancethatinterferometermovedanddistancethattargetmovedcanreflectthemeasurementerror.(采用激光干涉儀作為兩點之間距離的測量標準，干涉儀的反射鏡和跟蹤儀的反射鏡放置在工作臺上，工作臺由電機驅動，沿直線導軌運動。工作臺移動時干涉儀反射鏡的移動距離與被測目標的移動距離的偏差值反映了被校系統(tǒng)的測量偏差。)Components系統(tǒng)構成Workingprocess工作過程3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置10mlongprecisionlinearguiderailwhichhascogbeltstructure,feature：fastmovementspeed,cansavetimeofcalibrating.Supportingmechanism--selectmarbleplatformwithhighrigidityandstabilityasareferencefeature：highflatnessandstraightnessaccuracy,large-areaworkbenchenvironmentalcompensationuints--4branchesoftemperature，1branchofairpressure，1branchofhumidityfeature:placedonhorizentalguiderail,closedtolightpath，canmeasureenvironmenttemperaturearoundlightpathwithhigheraccuracy.10m精密直線導軌---選用齒形帶結構的直線運動導軌特點：運動速度快，可大大減少校準所用的時間。支撐機構---選擇剛性好穩(wěn)定性強的大理石平臺作為基準特點：平面度和直線度精度高，工作平臺面積大。環(huán)境補償單元---4路溫度、1路氣壓、1路濕度特點：放置在水平導軌上，與光路靠近，可更準確的獲得測量光路所處環(huán)境的溫度值。Horizontalaxis水平導軌3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置laserinterferometer激光干涉儀referenceplatform基準平臺Interferometriccombination干涉組合interferometermirror干涉儀反射鏡linearguiderail直線導軌airsensor空氣傳感器marbleplatform大理石平臺movingplatform移動平臺3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置2mlongverticallinearguiderailwhichisballscrewdrivenfeature:highloadandlong-termbearingcapacity,reliablelinearmotionandstability.basisplatform：solidmetalplatformofLevel00feature:nodistortion,canadjusttoparallelwiththehorizontalguiderail.Supportingmechanism：l=ltypemetalbackframefeature：solidstructure，Stablestructure,goodshockresistance,convenienttoadjustrailstraightness.2m垂直直線導軌----選用滾珠絲桿傳動的直線導軌特點：具有高載荷和長時承載的能力，能夠擁有可靠的直線運動、穩(wěn)定性好?；A平臺---00級穩(wěn)固的金屬平臺特點：不易變形，可通過調整與水平導軌平行。支撐機構---I=I型金屬背架，特點：結構穩(wěn)定，抗震性好，便于導軌直線度調整。Verticalguiderail(豎直導軌)3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置ControllerwhichadoptsPLCascontrolcore,andisresponsibleformotioncontrolofentiresystemfeature:itcanimprovethesystem'sstabilityandcontrollingaccuracy,enhancesystem'santi-interferenceability.Motor:thehorizontalandverticalaxesarebothdrivenbyACservomotorfeatures:canbecontrolledbyhigh-speedpulseoutputofPLC,selecthigh-speedpulse+directioncontrolmode,canpinpointthelocationofthemechanicalmovementposition.Operation----touchscreenandkeyboardcontrolintwowaysfeatures:Touchscreencanprovideaclearman-machineinterface,keyboardcontrolcanmaketheoperationeasierandmoreconvenient控制器---采用PLC作為控制核心，負責整個系統(tǒng)的運動控制特點：可提高系統(tǒng)的穩(wěn)定性和控制精度，增強系統(tǒng)的抗干擾性。電機---水平軸和垂直軸都采用AC伺服電機驅動特點：可由PLC的高速脈沖輸出口控制，選用高速脈沖+方向的控制模式，可以精確定位機械運動位置。操作方式----觸摸屏與鍵盤控制兩種方式特點：觸摸屏可提供清晰的人機操作界面，鍵盤控制可使操作更加簡單方便。controller控制器3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置softwareplatform軟件平臺Interferencerangingmodule（干涉測距模塊）ThismodulecanachieveInterferometerconfiguration,displayinterferencedata,andcontrolmeasurementmode.可以實現(xiàn)干涉儀的配置、干涉數據的顯示、測量模式控制。Environmentalmonitoringmodule環(huán)境監(jiān)控模塊Thismodulecandisplay,collectandmanagelabenvironmentstateautomatically,supportreal-timemonitoringofquadtemperature,onebranchofpressureandonebranchofhumidity.可以自動采集顯示、管理實驗室環(huán)境狀態(tài)，支持四路溫度、一路氣壓、一路濕度的實時監(jiān)控Dual-axislinearmotionguidescontrollingmodule雙軸直線運動導軌控制模塊Thismodulecancontrolmovementsofhorizontalandverticallinearmotionguidesinseveralpatterns,includingmanual,automatic,cyclingmovingmode,etc.可以對水平直線運動導軌和豎直直線運動導軌進行多種運動模式控制，包括手動、自動、循環(huán)等運動模式。datamanagingmodule數據管理模塊Thismodulecanmanagedatameasuredbyinterferometer,includingdatanaming,storage,display,analysis,preservation,andotherfunctions,inaddition,analysisfunctionincludecalibrationresultsevaluation.可以對干涉儀測量是數據進行管理，包括數據的命名、存儲、顯示、分析保存等功能，其中分析功能中包括對被校設備校準結果的評價。3Due-axisLasertrackercalibrationdevice雙軸激光跟蹤儀校準裝置Software--chart軟件--結構圖干涉測距模塊Interferencerangingmodule環(huán)境監(jiān)控模塊Environmentalmonitoringmodule運動控制模塊MotionControlModuletemperaturepressurehumidity溫度氣壓濕度horizontal/verticalaxisdisplacement水平軸位移豎直軸位移datamanagingmodule數據管理模塊interferometermeasurementdata干涉儀測量數據relationshipsofmodules各模塊之間的關系Software--Measurementanddatamanagementmodule軟件--測量及數據管理模塊Software--Environmentalmonitoringmodule軟件--環(huán)境監(jiān)控模塊Software--Due-axismotioncontrolmodule軟件--雙軸運動控制模塊四、Trackercalibrationdevicedesignschemecomparison跟蹤儀校準裝置設計方案比較Program1Independentverticalaxis,horizontalaxisadoptthree-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.（豎軸獨立，水平軸采用三光路干涉測量,水平軸采用大理石導軌，氣浮式工作臺。）Program2Verticalaxisabovehorizontalaxis,horizontalaxisadoptthree-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.豎軸位于水平軸上，水平軸采用三光路干涉測量，水平軸采用大理石導軌，氣浮式工作臺。Program3Independentverticalaxis,horizontalaxisadoptsingle-light-pathinterferometry,andmarbleguiderail,airfloatingworkbench.豎軸獨立，水平軸采用單光路干涉測量，水平軸采用大理石導軌，氣浮式工作臺。Program4Independentverticalaxis,horizontalaxisadoptsingle-light-pathinterferometry,andmarbleguiderail,metalguiderail.豎軸獨立，水平軸采用單光路干涉測量，水平軸采用大理石平臺，金屬導軌。Scheme1方案1lightpath光路Horizontalaxisadoptthree-light-pathsynchronousinterferometry,compensateAbbeerrorinrealtimetoachieve"coaxialsynclastic"measurement.水平軸采用三光路干涉同步測量，實時進行阿貝誤差補償，實現(xiàn)“同軸同向”測量。structure結構independenthorizontalaxisandverticalaxis.Horizontalaxisadoptmarbleguiderail,airfloatingworkbench.Verticallinearguiderailismechanicalaxis，whichisballscrewdriven..水平軸與豎軸分開，各自獨立。水平軸采用大理石導軌，氣浮式工作臺。豎軸為機械軸，滾珠絲桿傳動。

index指標horizontalaxismeasurablerange(橫軸可測范圍):<80m,

MeasurementUncertainty（測量不確定度）:0.3+0.3LmmVerticleaxismeasurablerange（豎軸可測范圍）:>2m

,MeasurementUncertainty（測量不確定度）:1+0.5LmmFeature特點Highprecision,simplestructure.（精度高，結構簡單。）Theoveralleffectdiagram總體效果圖Scheme1方案1Independentverticalaxis獨立豎軸Scheme1方案1Horizontalaxisthree-light-path水平軸三光路Scheme1方案1Verticalaxissingle-light-path豎軸單光路Scheme1方案1Scheme2方案2Horizontalaxisadoptthree-light-pathsynchronousinterferometry,compensateAbbeerrorinrealtimetoachieve"coaxialsynclastic"measurement.水平軸采用三光路干涉同步測量，實時進行阿貝誤差補償，實現(xiàn)“同軸同向”測量。Verticalaxisisabovehorizontalaxis，biaxiallinkage.Horizontalaxisadoptmarbleguiderail,airfloatingworkbench.Verticallinearguiderailismechanicalaxis，whichisballscrewdriven..豎軸位于橫軸上，雙軸聯(lián)動。水平軸采用大理石導軌，氣浮式工作臺。豎軸為機械軸，滾珠絲桿傳動。horizontalaxismeasurablerange(橫軸可測范圍):<80m,

MeasurementUncertainty（測量不確定度）:0.3+0.3LmmVerticleaxismeasurablerange（豎軸可測范圍）:1m

,MeasurementUncertainty（測量不確定度）:2+2Lmm(singlemarble4m)Horizontalaxishashighprecision,canprovidestandardlaserplane,whi