MEMS數(shù)字麥克風(fēng)基本知識課件

1、MEMS(數(shù)字)麥克風(fēng)基本知識MEMS Microphone 產(chǎn)品簡介 MEMS麥克風(fēng)是由MEMS微電容傳感器、微集成轉(zhuǎn)換電路(放大器)、聲腔及RF抗噪電路組成。MEMS微電容極頭部分包含接收聲音的硅振膜和硅背極,硅振膜可直接將接收到的音頻信號經(jīng)MEMS微電容傳感器傳輸給微集成電路,微集成電路可將高阻的音頻電信號轉(zhuǎn)換并放大成低阻的音頻電信號,同時(shí)經(jīng)RF抗噪電路濾波,輸出與手機(jī)前置電路相匹配的電信號.完成“聲-電”轉(zhuǎn)換. MEMS Microphone 工作原理MEMS Microphone 產(chǎn)品簡介V outSilicon Back PlateSilicon diaphragmGNDRF Fi

2、lter MEMS Microphone Module StructureV supplyMEMS Acoustic SensorASICMEMS Microphone 產(chǎn)品簡介MEMS WaferMEMS Die MEMS Microphone Wafer & MEMS DieMEMS Microphone 產(chǎn)品簡介 MEMS Microphone ProfileAcoustic port hole LW H4213PIN# FUNCTION1.OUTPUT, 2.NO CONNECTION3.GROUND, 4.POWERMEMS Microphone 產(chǎn)品簡介序號名稱1Cover2Hou

3、sing3Wire bonding4PC Board5Capacitor 10pF6Capacitor 33pF7ASIC8MEMS Die MEMS Microphone Structure12367854MEMS Microphone 產(chǎn)品簡介SpecificationMEMS MicrophoneFrequency range 100-10,000HzSensitivity (0dB=1V/Pa 1k Hz) -42dB+/-3dB Output impedance 58dBRF-filtering capacitance 10pF, 33pF, both or noneChange i

4、n sensitivity(電壓特性) 1dB across voltage rangeStandard operating temperature -40 to + 100 Current consumption 0.25mASupply voltage ratings 1.5V to 3.6V Performance ComparisonMEMS Microphone 產(chǎn)品簡介 Recommended Interface CircuitAAC MEMS MicrophoneTerm3.Term2.Term4Term1-+VrefExternal Gain=-R1/R2(Set by cus

5、tomer)+R2R1MEMS Microphone 產(chǎn)品簡介 Solder Reflow ProfileMaximum solder profile: Do not exceed profile listed in this tableStageTemperature ProfileTime (Maximum)Pro-head170180 120sec.Solder MeltAbove 230 100sec.Peak260 Maximum30sec.Incoming InspectionWafer SawingWafer Expand SMT/glueingPackaging/Cutting

6、Testing / Marking / TapingShipping InspectionPacking Wafer Fabrication Packaging Wafer FoundryPick up and place MEMSWire BondingReliability TestWafer TestingWafer Inspection Production ProcessMEMS MicrophoneMEMS Microphone 產(chǎn)品簡介Cellular Phone(CDMA, GSM, PCS), Camcorder Phone,MP3 Phone, PDA Phone etc.Camcorder, Digital Camera etc.Ear Phone MIC for Headsets, MP3, Bluetooth, etc.Notebook Computer,Desk-Top ComputerVideo Door Phone etc.Cordless Phone MEMS Wafe