潔凈度等級標準和空氣過濾器效率標準

1、潔凈度等級標準及空氣過濾器效率標準相關行業(yè)和潔凈度（需求）INDUETRIESFIELDREQUIREDCLEANAIRSYSTEMANDCLEAMLINESSLEVEL的利用I程與/冷度比R導畫的產史羋導件工業(yè)蔻品圓干說«赭»敕«光隼卬用其他店學花凈度等駛CLEAHLIKESSLEVEL(CLASS)Ml.5、2,5n-】o勵M3.X1O0緩M4,5(1,000®)基板制造陽iFER拒tnfF&CTiJRE如散DIPFUS而基板處理曲FERFWCEESI記/光剜FHDTOLnHOCMFKr芯片何適元國IPXMnJFMTUKEM5.5C10口口口

2、緞)M65000,00030SIIJOOMCKYSmLZATIoMI組裝心SEMTLIH；枚測IMPECTimr/逐板表面消洗SKRFKECLEAHIBC二7/光刻FHDIDLITH0GEAFHT華色嬲光片mLOFJILTEE7組裝舞£近14匹百羲、南喈MAGMETIt血更3點7陽苣SIOCffiKftSI/g借噂管/HIGHEELTABLETUTS/孵族或減型鼬*HFO后CCT>EMIM/TIAREAMW；火股用如伴PARTSFQR和比ET士鐘表、計量儀、岫.聿微TCHMETEKKEAEIHG./L5I里觸面MSK丁除LENf7日舟叵京橋PRIHTCIRCUIT的皿脛片FIL

3、M是密印刷FfiECISISTFRI正活沙置諾由LMWIIRYFORGMOIEHTW電先發(fā)生學MSERfEKE助TQR/1甑丁術EFEEI，L口庫幽門口萬/迪金*.由由帆aFEftATlOW7UJ7SPECIALTAEATEirr/恢復室ICU.CCU神口WETNOT/新生兒至1IB0ATALRD旗J由床也衽：lihicnrspECTimi7/無帝制制/CMTimAKEA函刊室MEDICI證ROOK無萌動物FATMJGEFFREE幽MAL/SFFAWIMAL/S旌ANltWL能惻，抗生物質AHTIBIOUC/普通西品WMtLMSHCIHESFTEFARATIO1TPROCESS,/'前

4、進.發(fā)酸ERE況FEEXEHTHIOM/同制品DAIRYFIDDMCTSa-fljOTFOODPMJCESSING解乳制品PASTEMUSHE0CM/工塔舞ARTIFICIALCULfij而/簾苦，實餐EM茂KMEMHMGPATHOS為建，因手工履，JEHETLCEMGImERIHD腫病氟等TUMOF,“璐U&/笄唯F幻丸樁/正壓造停用境POSITIVEPKESSUKECLEANfDOM/負壓落浮耳航BEGATI1EEFfiESSUKECLEANMOM空氣過濾器效率規(guī)格對照表FillerErficiencyandClassifications澳洲規(guī)格（EnTT9）IEuropeU17U

5、16U15H14H13H12_HllH10F9F8F7F6_F5G4_G3G2G1卻IN嗎自域役敕窣MFFS計啟卷Arreste&67TT6ITmWlSIir中國傳潴分類ChinezeClasziification軸蠟法SodiumFlame鼠洲舊規(guī)格EurcventEUMEU13美國規(guī)格USAUH20999995M90的5H99.95*99.5V95*出色法Dut.圖g七I噗TO蛆IBA"I類“類20輒1k而時期5bn09Mi（0.5b垃科9機124。415gAI交高效EEfA亞高效Sub-HEFA筒中效E1rli-mtdinni粗放CcBTEeinTmdB99.mws留&

6、#187;99.mEB口1%TTYhlM一附州刑EU12EUlIEU10EU9EfJSEU7EU6EU5EU4EU3EU2EUIUH19uKiauhTtHl6Hl5Hl4£Hl3mTMIOL7L£L5匚？中ci中國G同3554-呢C9arEe中柬K-tdiwi篙中芯亞高池SQ"medial蠱比EEPk聯(lián)獅EH7T9G1wF3F6FTFSF9310HllEi2K13EKIni5-U17歐制EUUTEITEul氏】E4tuO區(qū)5EntEaTEnSEb9氏10氏11EU2EulSEul4潔凈標準與潔凈等級STANDAED&CLEANLINESSLEVELISO1

7、4644-1(ISO國際標雁)190等級-1各粒徑檔縱容許粒子濃度版m0.1m0.2Um13jJm0.5Um1MRI5Um1102210024ID43LOGO237】。23584_10,0002.370L020352835100,00023/0010,2003,52018322961,000,000.23LOOO102.00035,200M20_29371,000,00035100083.2002,93083.521DOO832,00029,300935.200.0008.320,000293,000PmStd,209Ed聯(lián)邦209E標徒)等級表示?？谥?.2Um0.3Um0.5Pm5Hm單位

8、體積單位體積單位體積單位體積單位公制英制(13_Jt3m3電m3Ft3曲Ft3曲F13Ml35L9,917573工90.87510.00.283HL51L24035,02657.5010S3.0035.31.00M23,50099.175721.4309S.751002.B3般.51012,4003502.65075,0L網30.0135310,0M355,0009917.570214109087.5100028.3D.510026,50075010.6003003530100眼T55002/4030,9008T510X00283M.5100035,3001.00024T7.00M5100.0

9、002,83061817,5115.510,00035100010,0002.47070.0M61000,00028,3006J80175曲,5100,0003530.000100,00024,700T001871。000,0002810006L6001750JISB992Q舊本活錚度標港)粒徑(M潔容度黝上轆度颯/M)等1等，2黝3等,5等鐮等如等進0J101R02103Pio10*1010f0.2224236,236023,6000.3110101,10101X100iOLooo10J00,000UUm0M0.5(0,35)35)351350150035,0003,5。0,0003,5叱0

10、002929029,00029.ODD府削翳財控范圍0.1-0,30.1-0.50.1-5.00.3-5.0品上工LIH餐+潔凈標準與潔凈等級STANDARD&CLEANLINESSLEVEL氣流方式與悔收ModeofAirflow白ndFuture方式項目,、垂直層充方式Vertical.LaminarAirflowCleanRoom水平層流方式lbrizontalLaimiiiaLrAiiflowCleanEoom亂施方式TuitulentAiiflowClean.Rooti溟充方式MixdAiiflowCleanRdon濤冷障道方式Timnelcleansystem港凈度Clea

11、n!inessM5-S.5U-io曝)M35l-iMQM4.5-6.5G,oco-ioi00®>M4.5-6.5(1,000-100,000®)池5,5(i-iao>H作時的潔凈度eaidinfE古inmrk排作者造成的黑嘀小上網側的發(fā)塵彩響下只側推作者會造成彩響根梅布局手畫蠟作昔會造成若干影響好作者造成的影喃小運擰藥用Em高申*中中市局變更PositiontobechaiiE虱都涉困難喜用裕困麻生產沒落的雄怕Naintnce在潔凈室內或褶環(huán)空間進行在話悖莖內或璃環(huán)空間進行在浩凈空內進行在清冷室內亞通庫空間進行在福環(huán)空間進擰增收Ezpsiidinc用碓困碓坡困瞪

12、用耀可以高將度交陽ACControlprecision由于對整個咕凈型進行根制.相有不劃句上鳳側的發(fā)熱彩喃下孰惻有不均勻況毅有不均句現敘可對蟀作邸分避行鬲精度控制氣流方式而deofAirflow、.二1二-L-1-i-11IL_*%b的ft1EpriFilSti4Ib推有風速及橫氣欣麟空氣灌冷度與緩CleanlinessLevel氣流流型TypeofAirFlow平均風速AwerateVelocitytjn/s)怏氣帔敢TimeofAiiChazier上4單向流UhilateralFlow0S-0.5一5單向通Ikiilat«ialFlow0.2-0L36非單向流IfcirVrdla

13、teralFlow50-60T非單向流Ifoir-Unilateral7low12-25非單向流Noir-UidlataralFlowiws注;鞭氣質地武用F層高，M，面的活冷克,克國人員少.故洋少肝.白烝用T限值ffo-tft；Tints*£mr匚1mmistLeeqjtewithC/R島iqhLi匚htlesstlrnu4.&nWLenasiml1nunb&rq£pefbooeajadLeaitKwcebeiwinC/RthIwlimitsLould.beHilopted常見塵埃粒徑分布（112肉眼可見區(qū)域00001Q0010010.1L101001U0

14、O燃碘密飛塵冶金粉塵原灰水泥灰塵可吸入照粒物氣體分子顏K附未號評灰塵降塵重工士毒瓢鬣挖粉里演用于毛發(fā)殖于10000000010,0010.01QA10100010000肉眼可見區(qū)域附：空氣潔凈度等級表2.0.1等級每立方米（每升）空氣中>0.5微米塵粒數每立方米（每升）空氣中）5微米塵粒數100級<35X100(3.5)1000級<35X1000(35)<250(0.25)10000級<35X10000(350)<2500(2.5)100000級<35X100000(3500)<25000(25)注：對于空氣潔凈度為100級的潔凈室內大于等于5微米塵粒的計算應進行多次采樣。當其多次出現時，方可認為該測試數值是可靠的。潔凈室的溫、濕度范圍表6.L4潔凈室的溫，濕度范困房間性質溫度CC）濕度（）