TFC膜系設(shè)計實例教程

TFC膜系設(shè)計實例教程TFC膜系實例設(shè)計步驟（首先以AR膜三層為例介紹）首選鍍膜材料：AL2O3ZRO2MGF2AR膜技術(shù)要求：400——700R〈1來調(diào)用文件。運行TFC軟件（如圖1），選擇“取消”按鈕，如要打開已設(shè)計好的膜系文件，可按“打開來調(diào)用文件。4.在File菜單中選擇NewCoating選項（如圖2）。5.進入環(huán)境編輯界面（EditEnvironment）如圖3TFCalcunt±TledIFileEditFlodify坦10Re^ultsMiE￡_.HelpEdxtEn^.-tCo-atingn-ame:untitledFir^tSurJace:CancelAn-EilysisF-drameters...Referencewavelength[nm]HluminanLIncident(deg):IncidentmediLim:Substrate:Thicknesa[rnrri):ExitIdedium:Detector:|FrontEnvironment:16.在環(huán)境編輯界面中，第一項為監(jiān)控波長（Referencewavelength），默認設(shè)制為550（圖3）。如果設(shè)計400-700波段的AR的話，就可以用這個設(shè)制。如要設(shè)計紅外波段的話，那就要改大點。設(shè)好后，點擊AnalysisParameters....項，進入下一個波段的設(shè)制界面（SetAnalysisParameters）o（如圖4）6.在SetAnalysisParameters界面中選WavelengthsandAngles設(shè)計波段范圍，在第一個輸入框里輸入起始波段400，第二輸入框里輸入結(jié)束波段700，第三個輸入框里的為步長，可以不改，其它的不動（如圖4）。輸入完成后，按“OK”鍵確認，返回到如圖3的界面，再按“OK”鍵，進入設(shè)計界面（如圖5）TECale—untitled［日、事訂RuMi7￡FplpPlotF叵岡Angle:0-U(deg：iCQfetrQin.ee:EEO_□(rou)PolarlEstion:Ave^―Opti?:>riEIlltuiinsist:VHITEHadiunrJLIKSiibstrate:&LASSExit-:&LASSLstz：nt■:-r:IDEAL5.0TECale—untitled［日、事訂RuMi7￡FplpPlotF叵岡Angle:0-U(deg：iCQfetrQin.ee:EEO_□(rou)PolarlEstion:Ave^―Opti?:>riEIlltuiinsist:VHITEHadiunrJLIKSiibstrate:&LASSExit-:&LASSLstz：nt■:-r:IDEAL5.0500■550550700750Refie>ztai：ic±(%JvsWave1engt-h.|nm)AngleTarget(begnTofardnccEn'/iranment7.在Modify菜單中選Layers一Front（如圖6），然后進入添加膜層。（如圖7）TFCalc—uni:itled.LJ回區(qū)FileEditRimEexultsMi還H^lpOptlQlLSErivirurLirient...■5_O4_84_44_uIllimitMeiliiuiizSi.i±?streEi：it.:Det.ect.rLayers-FrontLayers一TFCalc—uni:itled.LJ回區(qū)FileEditRimEexultsMi還H^lpOptlQlLSErivirurLirient...■5_O4_84_44_uIllimitMeiliiuiizSi.i±?streEi：it.:Det.ect.rLayers-FrontLayers一B：±ckGrcHipE400EtackFurrrnil：±...gls:u-Ui,degjferemze:.5.50.0(iiill：i1mi:±zation:AveTzF-tSi.irfaczFrc-iitT：n-gets一HisereteTai-gets一CuntirLiiouzTjjtgets一CurLQ-AiLglyComnientsV：xt_i=ibleHitial與MixtureMateri：alzEriviriZirdTi^ntenri.al吝SubitriteeDetectursDistributiuns4SU■EULi■E.EU6006S07007-EUE3TFCalc-untitledfaBLayers—FrontOj't:■■■■X■■"1■DeleteF丁口ntLayers...—Pt-iniFrontLsycreCopyFrontLayerEFion...Appe^B.dFtnntaFrom...ReverseTrontLayersAdjustFtLayers￡orAngle...CariEalidateFrontLayersCompu」Compii+eEi_(uivaltiflIilIsk...eIQuivalentStack...hiEknessTotals...j：iyerDatafronTile...-ayerDatainTile...4-ij^itrD-ita.inCls.pboii"d.tuteLayerlata...ShewBeadSaveSaveSubstIII111111Bill1111■III■■r6006-51][iJaveleni^t-h7D0750(ma)1thjrKt;j.j.i±?_:la_i'_>=imjvsAL-J2.ee□.u圖77.選擇OptionsFrontLayers???..,添加層數(shù)，如圖7,在彈出的輸入框的第一個中輸入3代表3層，如圖8

?ileEditModifyKmEesillteMiec.M&lp￡3Layers-FrontOti+ionsEloreOptiorsLayerMaterialQV/OTThickness[nm]Optimize?GroupConstrain?Mn.ThicknessMaxThicknessNeedles?AddJ44-z4-0111111Curreritnumberoffrontleyers:0MdIfls:aitirgat11111111111111111iiiiii1111114i：n：i4.50500.55060065DReflecta^ice(%|vsTiJaveletiizrth(]UKCaned■8.然后點“OK”，進入，出現(xiàn)如圖9的畫面。QTFCaLc-un±itled1FiloEd.31Modi￡yHijjlFLc^-all=HiHslp■4Tn-TB-—17Opti■:-nsMoreOpti■:-nsL^per123MateiialM5FZMGF2MGF2QWOTI.OOOLIl.riOOLil.riOOLiIhekne?^|nrri]99.2199.2199.21Optimize?NoNoNoGroup111Cmslran?NoNoNoMin.ThickriefsU.OCClLlnmU.ULOOnrriU.ULOOnrriMax.Thickness0.0000nn0.0000nm0.0000nmNeecles?YesYesYes斗■?■.--.11IIIIIIIIIIIIIIIIIIIII4.UJ——:::::::-4004.50SOLI5-506006-5070D750keflectarice(%)v=.T1Javale1i13t.l1(n>J圖99.現(xiàn)在把Material（材料）項中的，改成你所要的材料AL2O3ZRO2MGF2,把Optimize?（優(yōu)化否）項中的NO,全部改為YES（如圖10）EJTFCalc-untitled_區(qū)1_.4■TileEditM3difyRimFLesultsMiec.Help■x■,E"1Layers--Front區(qū)1Options[loreOptionsLayer123Material址ZRJ2\1GF22W0T1.0C0C10000'.0303Thickness(nm|04.4167.4C392'Jptiniz^?YesfesV袈Gfdlp11一Constran?NoNdhoMin.ThicknessQOOODrm0.03COurr10000Max.ThicknessQOOODrm0.0JCOurr10000Needles?YesVesYes111111*圖1010.選擇Modify菜單中的Targets—continuous項來設(shè)定優(yōu)化目標（如圖11）TFCalc-untitled□111?Modi￡y￡3piotEtlviruriiTieTLt...StackFc-rnp-ili...OptionsIlli-ULMeilix：gi.lti￡tExit.:Em匚Layers一FitmtTFCalc-untitled□111?Modi￡y￡3piotEtlviruriiTieTLt...StackFc-rnp-ili...OptionsIlli-ULMeilix：gi.lti￡tExit.:Em匚Layers一FitmtL：±7t=re-BackGroupeT：±t_gets一DiecreteLiiqIezU.Li(deg>Referemze:￡￡LI-0(nmPularizat.iuiizAwe—Fixst.Surface:Frciiit.E_i：iTargets-CoiLtinnouET：m^E亙七三一Coilh—AiL^rleComments4_8V：±fiatil色Mat口eial￡Mixtiu'eMateri=dls4_6Exivii-cruriexits4_84_6Exivii-cruriexitsM：dtt=ri：<LE4_4Snib4_4SnibztrateeIliuminiiiLtstors4_2Dietributions4_04004.50500.5506004_2Dietributions4_04004.50500.550600650700750P.efJl丁與Wmvmlmogthf坦皿)圖1111.選擇Options中的AddContinuoustargets....（如圖12）,點擊進入，如果是創(chuàng)建一個優(yōu)化目標的話就不用改，如果要創(chuàng)建幾個優(yōu)化目標的話，就在第一個輸入框中輸入幾。如圖13TFCalc—untitled口匚區(qū)IE"STargets-Continuous□pticins||AddContinuoiiET：ii"gets...DeleteCuntirLUijUiT：±rgets.-PrintCdilIiniiousTargetsCopyC<tl+inucusT：u_getsFrom,?■AiipendCuntirLinjuzTwrgntuFrum...OptlOIL1Option2Option3Target(end)ToleranceEnYironment?FileElitModi￡yRimResialtsMiec.Help圖12TFCalc-nutit1ed.OjitioreTargetttKindRefl/TranF'ularizatiunWdVelengthI'begiri)4.8--Wsvelenglh(emilAngle4.6■■-7argetI'begin'lTargetlend]4.4--ToleranceEn'/irnnment4.2■■-4.LiEUUE-EUt.UUt-SU7UU7SUTiJaL^Q1(JiHi：iXIOj'tionsaSTargets-ContirniousPileEditModify￡unEe^ultsMisc.HelpIlluHedlSiihsEKitDete5.0t圖1312.如圖14,在Wavelength(begin)(起始波長)處輸入400,在Wavelength(end)(結(jié)束波長)處輸入700其它不要動。PileEditMedifyRimEseuI+eNlec.HelptfordHPlotOptions5.04.Z4.□E3Target￡-ContinuousUjitiurtsTarget#1KindIntensityFlefl/TranReflPolarizationAveWavelength[begin]400.0Wavelength(end)700.0Angle0.0Iarget[begin]0.0Target[erid]0.0Tolerance1.0Environment|0igthIllUMedi如由mExIt400500550600砧口700750P.b!fItjCtSixCt!(%：ivs圖1413.完成后，選Run菜單的OptimizeDesign選項進行優(yōu)化，如圖15EJTFCalc-untitLedf^~||5^]FileEditModifyResultsMl5c.Help表格⑥窗口也）幫勖班）F3An：ilyE&UrJ_yInteractiveArL；dljr5L5.-.Qpiot11luMediSi_il.sE3：itDer.e■5.U7—Tar；4_8--4_6--4_4-OptioilsOptimizeD&signF4TargetttKindRefl/TiarPularizatii'w'dvelen'w'avelenAngleTarget|'bTarget(eClL-balSe:ai-chCurTifnittIFICoihput白EEMi+iviiyCiiinipmteNomtorCurv已CufTiputeLayerSensitivi17...匚emput白Tit=lA...SetArL：alysisF：xt_meters...SetOptiniiratiorLF：=Lr：inieters..-SetG1oL：ilEe=±rchP：±i_=dineters.-SetSetToleranciSetrT/ironrriSensitivityF^oieterz...KonitoringP：ii-：=diietere...圖1514.優(yōu)化界面如圖16OptiaizationProgressIndexProJile3.0-Layers:31.0-2.0-TargetDeviationsPhysicalThickness(nml:287.3Targets:1010.0Iteration:Deviation;Change\%]:0.2970.000Status:Stoppingcriteriamet圖1615.優(yōu)化完成后，點擊Analyze查看優(yōu)化后的曲線，如圖17E~MTFCal