外文翻譯--采用表面微加工技術(shù)制造微型行星齒輪減速器 英文版

MICRO PLANETARY REDUCTION GEAR USING SURFACE-MICROMACHINING Abstract: A micro planetary gear mechanism featuring a high gear reduction ratio with compactness in size is presented in this paper. SUMMiT V is employed for the fabrication method so that the redundancy of assembling parts is eliminated. The design rules of which has also been checked. To make full use of the benefits of the surface-micro-machining, the planetary reduction gear is designed toward using the on-chip micro-engine. The expected gear reduction ratio is calculated and compared with the conventional chain gear mechanism. The micro planetary gear mechanism presented in this paper is expected to have 162:1 reduction ratio utilizing less space consumption. This is an order of magnitude higher than the previously reported design in a single reduction gear train. Keywords: MEMS, planetary gear, reduction gear surface-micromachining, SUMMiT V process First, what is reducer? Reducer is dynamic communication agencies, the use of gear speed converters, and motor rotational speed reducer to the Rotary to be few, and have greater torque institutions. The reducer role 1) velocity at the same time increase the output torque, torque output ratio by motor output by slowdown, but the attention should be paid to exceed the rated torque reducer. 2) the speed at the same time reduce the inertia load, the inertia of deceleration than reduced to the square. We can look at the General Motors has a value of inertia. The type of reducer General helical gear reducer has reducer (including parallel shaft helical gear reducer, a worm reducer, bevel gear reducer, etc.), planetary gear reducer, Cycloid reducer, a worm reducer, a planetary friction CVT mechanical machines. Common reducer 1) worm reducer is the main characteristics of a reverse self-locking function, can be larger than a slowdown, input shaft and output shaft axis is not the same, nor in the same plane. But generally larger, transmission efficiency is not high, the accuracy is not high. 2) Harmonic Harmonic Drive reducer is controllable using flexible components to transfer elastic deformation and dynamic movement, not volume, high precision, but the disadvantage is that flexible wheel limited life, impatient shocks, rigidity and pieces of metal relatively poor. Not too high speed input. 3) planetary reducer its comparative advantage is compact structure, the return gap small, high precision, and have a long life span rated output torque can be done great. However, a price slightly expensive, the requirements of parts before assembly 1. Rolling cleaning with gasoline, kerosene other parts cleaning. All parts and Xiangbenna not allowed to have any impurities exist. Gear box and the inner wall (Worm), unprocessed surface has not been coated twice erosion-resistant oil paint, box has the outer surface coated primer and paint color (color requested by host). 2. Parts coated with a face wash after lubricants. Second, the requirements of installation and adjustment 1. Rolling installation Rolling bearing inner ring should be installed at the shaft shoulder close to gap must not pass 0.05 mm thick Cypriot feet. 2. Bearing axial clearance of the clearance can not be adjusted bearings (such as deep groove ball bearings), axial clearance of0.25 to 0.4 mm； the clearance adjustable bearing axial clearance numerical table. Click Tapered Roller Bearings axial clearance； angular contact ball bearing axial clearance 3. Gear (Worm) meshing tooth space available Cypriot side foot of lead or pressure. Will be lead wire on the alveolar, and then turning gear and squash lead wire, measuring two teeth side was crushed lead wire thickness and the size of which is adjacent teeth. 4. Tooth contact dot cylinder gear tooth contact Dot 2-10-4； bevel gear tooth contact Dot 2-11-4； Gearing contact Dot 2-12-4 Third, seal requirements 1. Box partition between the surface does not allow any pads filled, but can be coated or water glass sealant to ensure that the seal； 2. Assembly, the bolt tightening box, before using 0.05 mm Cypriot-foot inspection Covers Block with me and between the sealing surface； 3. Shaft seal should stretch to smear grease. The seal should be installed in strict accordance with the requirements. Forth, lubrication requirements 1. Rationally determine the types of lubricants and greases and grades 2. Bearing lubrication fat, grease filled in the general Fatliquor space can be 1 / 2 to 2 / 3. 3. Lubricants should be regularly replaced, the new reducer used for the first time, the operation of oil-7 14 days, according to the situation can be after every 3 to 6 months for first oil. Fifth, the test requirements 1. Empty operation: at rated speed is, anti-running 1 to 2 hours； 2. Load test: at rated speed, rated load operation, the oil temperature balance to date. On the gear reducer, requested the pool temperature is not more than 35 oC, bearing temperature rise no more than 40 oC； the worm reducer, requested the pool temperature not more than 60 oC, bearing temperature of not more than 50 oC； 3. Entire testing process for the smooth operation, noise, not loosening the fixed link, sealed, not with the Sixth, packaging and transportation requirements 1. Protruding shaft and its annex should Oiler packaging； 2. Handling, lifting may not use screw rings and lug all of the above technical requirements are not necessarily listed, and sometimes also by other projects, mainly by the specific design requirements. Seventh,technical requirements 1. Assembly, all parts cleaning with kerosene, gasoline Rolling cleansing, while the existence of any debris. Oil is not painted wall corrosion coatings twice； 2. Backlash with lead wire mesh test of not less than 0.16 mm, lead wire Backlash may not exceed the smallest of the four times； 3. Used Tu-color dot test. Tooth high point of contact by not less than 40% of contact spots on teeth not less than 50 per cent. Can be used when necessary, grinding or scraping after grinding to improve contacts； 4. Bearing axial clearance should be adjusted: 40 0.05 - 0.1 mm, 55 0.08 - 0.15 mm； 5. Test reducer subdivision surface, the contact surface and seal, oil spills are not allowed. Split-Tu allowed to paint or water glass seal and allow the use of any filler； 6. Engine lubricants to the contents N100 provisions height； Below I introduce our country reduction gear the development present situation: First, the domestic reduction gear many by the gear drive, the worm drive primarily, but has the power and the load ratio generally is small, or velocity ratio great and mechanical efficiency excessively low question.Moreover, in the material quality and the technological level also has many weakness, the largescale reduction gear question is specially more prominent, the service l ife is not long.The domestic use large-scale reduction gear (above 500kw), many from overseas (for example Denmark, Germany and so on) imports The 60s start few tooth reduction gears and so on difference transmission, cycloid pin gear transmission, overtone transmission which produces has the velocity ratio to be big, volume small, mechanical efficiency higher merit? .But its transmission theory limit, cannot transmit the oversized power, the power all must be smaller than generally 40kw. Because in the transmission theoretically, the technological level and the material quality aspect has not broken through, therefore, has not been able fundamentally to solve the transmission power in a big way, the velocity ratio big, the volume small, the weight light, mechanical efficiency higher these requests basically.The 90s initial period, the home appears three links (gear) the reduction gear, is one kind of outside stable motion gear drive reduction gear, it may realize the great velocity ratio, transmission load ability is also big. Its volume and the weight are all lighter than the dead axle speed reducer gear, the structure is simple, the efficiency is also high.Because this reduction gear three axle parallel structure, therefore caused the power/volume (or weight) the ratio is still small.Also its input axis and the output shaft on the identical spool thread, this do not have in the use many inconveniently. Not only Beijing Institute of Technology develops in successful stable motion speed reducer gear to have outside three link reduction gear merit, but also has the big power/weight (or volume) the ratio, as well as the input axis and the output shaft on identical spool thread merit, is at the domestic leading position. The home has the minority college and the factory and mining enterprise does the research work to in stable motion gear drive certain principles, has published some research paper, in has done some work using the cycloidal tooth crop rotation stable motion reduction gear. Second the stable motion speed reducer gear principle of work synopsis, the stable motion speed reducer gear is refers to in a counter gear transmission, a gear in the stable motion generatoractuation mean plane parallel motion, meshing through tooth profile between, actuates another tooth crop rotation dead axle to decelerate the rotation, the realization reduction gear function. The stable motion generator may use the parallelogram organization, either sine organization or cross slide organization. This achievement uses the parallelogram organization to take the stable motion generator. The stable motion generator may be the hypothesized use parallelogram organization, also may be the entity use parallelogram organization. Has the practical value stable motion gear mechanism for in counter gear organization, therefore may divide into the internal tooth crop rotation stable motion movement and the external tooth crop rotation stable motion movement two kind of situations. Outside the stable motion gear reduction organization, its internal tooth crop rotation stable motion movement, actuates the external gear and makes the deceleration rotation output. This organization also calls three links (gear) the reduction gear. As a result of the internal tooth crop rotation stable motion, two crank centers establish outside the annular gear tooth ring, therefore its size is not compact, cannot solve the volume major problem. In stable motion gear reduction, its external tooth crop rotation stable motion movement, actuation internal tooth crop rotation deceleration rotation output. As a result of the external tooth crop rotation stable motion, two crank centers can establish in the external gear tooth ring, reduced the organization overall size greatly. Because in stable motion gear mechanism transmission efficiency high, volume small, input output coaxial line, therefore by widespread application prospect. Third, this project technical characteristic and key technologies?1. this project technical characteristics, in this new stable motion speed reducer gear and domestic and foreign had the speed reducer gear compares, has the following characteristic: (1) velocity ratio scope is big, gets up from I=10, may reach most greatly several thousand. If manufactures the great velocity ratio the reduction gear, then demonstrates this reduction gear the merit.(2) transmission power scope is big: And may connect a body manufacture with the electric motor. (3) structure simple, the volume small, the weight is light. Reduces about 1/3 compared to the existing speed reducer gear.(4) mechanical efficiency is high.95 .(5) this reduction gear input axis and the output shaft are on the identical spool thread. This reduction gear see Table 1 with other reduction gear performance comparison. Because lacks the data, various reduction gears power/load ratio which in the table arranges in order is most superior. Table Each kind of reduction gear comparison model power (kw) reduction gear ratio quality stable motion speed reducer gear, the SEW reduction gear quality contains the electrical machinery.2. this project key technologies? May know by Figure 2, in“stable motion speed reducer gear is by annular gear Z2, external gear Z1 and the parallelogram organization combination. Becomes its transmission principle is: The electrical machinery input rotary motion, the external tooth crop rotation parallel migration, its center of circle path is a circle, makes the dead axle rotation with it meshing annular gear. Because external tooth crop rotation parallel migration, therefore name stable motion gear mechanism. The gear parallel migration needs to have the auxiliary body help realization, may use (612) to sell the axis, the roller takes the hypothesized auxiliary stable motion organization, also may use the eccentric shaft to take the entity auxiliary stable motion organization. In the stable motion speed reducer gear key technologies and the essential craft are the composition parallelogram component size computation and the request processing precision, the gear teeth main parameter choice. These factors will all affect the transmission ability and the transmission quality. Overall speaking, the group cost reduction gear various spare parts all request to have the high precision, they will be deciding the reduction gear overall transmis3. this project survey this project has obtained the Chinese practical new patent, the patent number: This project trial produced the first prototype from 1995 (power 2.5kW, after velocity ratio I=32), with some factory and mine cooperation, has one after another designed following several kind of different powers, the different velocity ratio reduction gear.(1) electrically operated on rollers gate uses the reduction gear, power 550W, velocity ratio I=26, is united as one body with the electrical machinery. sion quality. (2) mixer uses the reduction gear, power 370W, velocity ratio I=17.(3) some military goods use two kind of reduction gears, one kind of power 370W, velocity ratio I=23.5； Another kind of power 370W, velocity ratio I=103 two level of transmission reduction gear.(4) steel mill large package rotary abutment reduction gear, power 7.5kw, velocity ratio I=64.(5) steel mill table reduction gear, power 7.5kw, transmission I=11. In this patent foundation, has developed one kind of new ultralarge reduction gear, the power may reach 1000kw, at present is developing subminiature (outlook size for a millimeter level) miniature reduction gear. The gear mechanisms in microelectro mechanical systems(MEMS) are commonly expected to generate high torque in the confined micro-size systems. However, it is generally difficult for the micro-scale systems to have such a high torque without having multiple reduction systems. The design of the reduction gear drive based on a planetary paradox gear mechanism can increase the torque within a compact area, since the micro planetary gear system has an advantage of high reduction ratio per unit volume 1. However its mechanism is so complicated that relatively few attempts have been made to miniaturize the gear systems 2-3. Size more et al. 2 used the mechanical paradox planetary gear mechanism to drive a robot for 1-in pipes forward or backward. They employed a single motor to drive the gear mechanisms with high reduction ratio. Precise gear fabrication was enabled by micro wire electrical discharge machining (micro-EDM). These parts, however, should be assembled before the drive motor is attached to the gearbox. Takeuchi ET. al. 3 also used micro-EDM to fabricate the micro planetary gears. They suggested special cermets or High Carbon Steel for possible materials. While the design can achieve a reduction ratio of 200, the gears should also be assembled and motor driven. To enable the driving of the planetary gear by onchip means, Sandia Ultra- planar Multi-level MEMS Technology (SUMMiT-V) process 4 for planetary gear fabrication is adopted in this study. The SUMMiT-V process is the only foundry process available which utilizes four layers of releasable polysilicon, for a total of five layers (including a ground plane) 5. Due to this fact, it is frequently used in complicated gear mechanisms being driven by on-chip electrostatic actuators 5.However, in many cases, the microengines may not produce enough torque to drive the desired mechanical load, since their electrostatic comb drives typically only generate a few tens of micronewtons of force. Fortunately, these engines can easily be driven at tens of thousands of revolutions per minutes. This makes it very feasible to trade speed for torque 7.Rodgers et al. 7 proposed two dual level gears with an overall gear reduction ratio of 12:1. Thus six of these modular transmission assemblies can have a 2,985,984:1 reduction ratio at the cost of the huge space. With the desire for size compactness and at the same time, high reduction ratios, the planetary gear system is presented in this paper. It will be the first planetary gear mechanism using surface micromachining, to the authors knowledge. The principles of operations of the planetary gear mechanism, fabrication, and the expected performance of the planetary gear systems are described in this paper. Principles of operation An alternative way of using gears to transmit torque is to make one or more gears, i.e., planetary gears, rotate outside of one gear, i.e. sun gear. Most planetary reduction gears, at conventional size, are used as well-known compact mechanical power transmission systems 1. The schematic of the planetary gear system employed is shown in Figure. Since SUMMiT V designs are laid out using AutoCAD 2000, the Figure 1 is generated automatically from the lay out masks (Appendix 1). One unit of the planetary gear system is composed of six gears: one sun gear, a, three planetary gears, b, one fixed ring gear, c, one rotating ring gear, d, and one output gear. The number of teeth for each gear is different from one another except among the planetary gears. An input gear is the sun gear, a, driven by the arm connected to the micro-engine. The rotating ring gear, d, is served as an output gear. For example, if the arm drives the sun gear in the clockwise direction, the planetary gears, b, will rotate counter-clockwise at their own axis and at the same time, those will rotate about the sun gear in clockwise direction resulting in planetary motion. Due to the relative motion between the planetary gears, b, and the fixed ring gear, c, the rotating ring gear, d, will rotate counterclockwise direction. This is so called a 3K mechanical paradox planetary gear 1. Fabrication procedure and test structures The features of the SUMMiT V process offer four levels of structural polysilicon layers and an electrical poly level, and also employ traditional integrated circuit processing techniques 4. The SUMMiT V technology is especially suitable for the gear mechanism. The planetary gear mechanis