缺陷檢查培訓演示

（優(yōu)選）缺陷檢查培訓當前第1頁\共有23頁\編于星期一\12點21xxCapabilities2當前第2頁\共有23頁\編于星期一\12點3當前第3頁\共有23頁\編于星期一\12點RunOverview4當前第4頁\共有23頁\編于星期一\12點RunonewaferInspectionQueue5當前第5頁\共有23頁\編于星期一\12點6當前第6頁\共有23頁\編于星期一\12點7當前第7頁\共有23頁\編于星期一\12點8當前第8頁\共有23頁\編于星期一\12點9當前第9頁\共有23頁\編于星期一\12點StoppingtheInspection10當前第10頁\共有23頁\編于星期一\12點DefectOverviewWhymonitordefects?

Toimproveproductionyields,defectsneedtobemonitoredandstatisticallyanalyzedateachstageofwaferproduction.11當前第11頁\共有23頁\編于星期一\12點DefectSort1.False:Foundnothingafterreviewwithinspectiondata.2.Unkown:Defectswerefoundbutthereisnosuitabledefectcodetoassign.3.Fallonparticle:Particleonsurfaceofpatten.

4.Infilmparticle:Particlewascontainedinfilm,suchaspoly,HDP,metalandsoon.HDPPoly12當前第12頁\共有23頁\編于星期一\12點5.Scratch:Especiallyforscratchcausedbyrobot,othertoolpartsorman-made.Defectmap:Defectiamge:MicroMacro13當前第13頁\共有23頁\編于星期一\12點6.Discolor:Colordifference7.Masking：Shouldbeetchedbutstillremian(poly,SiN,spacer,metalandsoon).

Someconnectmorethantwolines,it’sbridge(killer).14當前第14頁\共有23頁\編于星期一\12點8.Ringlikedefect:SuchasdefectscausedbyARCsplash,usuallyrelatedtoPHOTO.PolyMetal9.Grapelikedefect:InducesbyPHOTOPU.15當前第15頁\共有23頁\編于星期一\12點10.Residue：Alwayshappenafterwetstationclean.11.Pattenabnormal:Roughness,Defocus,Pattenshiftandsoon.RoughnessDefocusPattenshiftPattenAbnormal16當前第16頁\共有23頁\編于星期一\12點12.Concave:COP（Crystalorientedpits）,OxideLoss，Pits.13.Peeling:Patternshiftormissing（Wplugisoneofpeeling,alwaysappearatwaferedge.）17當前第17頁\共有23頁\編于星期一\12點14.Blind:CTorViahavenotbeenopened.15.Pattendamage:MetaldamagePolybrokenispattendamagetoo,alwayshappenduringHighImp.18當前第18頁\共有23頁\編于星期一\12點16.WResidue:1).CausedbyOxideLoss;2).CausedbyCMP.NORMALABNORMAL17.Under_Pat：Underlayerpatternfailissue.19當前第19頁\共有23頁\編于星期一\12點18.Salicide_abnormal:Salicidepoorformation.19.Grain:Includingpolyormetalgrain.20當前第20頁\共有23頁\編于星期一\12點20.Slurry:

21.PR/Polymer_remain:PRhasnotbeenstrippedcompletely,typicallycontainsCarbon21當前第21頁\共有23頁\編于星期一\12點22.Arcing:23.Lineopen:22當前第22頁\共有23頁\編于星期一\12點24.Corrosion:Causedbyet