JJF-傳聲器相頻特性校準(zhǔn)規(guī)范靜電激勵(lì)器法

PAGEIIPAGEII中華人民共和國(guó)國(guó)家計(jì)量技術(shù)規(guī)范JJF××××－202×測(cè)量傳聲器相頻特性校準(zhǔn)規(guī)范（靜電激勵(lì)器法）CalibrationSpecificationforPhase-FrequencyCharacteristicsofMeasurementMicrophones(ElectrostaticActuatorMethod)（征求意見(jiàn)稿）202X－XX－XX發(fā)布202X－XX－XX實(shí)施國(guó)家市場(chǎng)監(jiān)督管理總局發(fā)布JJF××××—××××測(cè)量傳聲器相頻特性校準(zhǔn)規(guī)范（靜電激勵(lì)器法）CalibrationSpecificationforPhase-FrequencyCharacteristicsofMeasurementMicrophones(ElectrostaticActuatorMethod)JJFXXXX－202X歸口單位：全國(guó)聲學(xué)計(jì)量技術(shù)委員會(huì)起草單位：中國(guó)測(cè)試技術(shù)研究院中國(guó)計(jì)量科學(xué)研究院杭州愛(ài)華智能科技有限公司新疆維吾爾自治區(qū)計(jì)量測(cè)試研究院本規(guī)范委托全國(guó)聲學(xué)計(jì)量技術(shù)委員會(huì)負(fù)責(zé)解釋。

本規(guī)程主要起草人：桂桂（中國(guó)測(cè)試技術(shù)研究院）孫磊（中國(guó)測(cè)試技術(shù)研究院）牛鋒（中國(guó)計(jì)量科學(xué)研究院）參加起草人：萬(wàn)正軍（中國(guó)測(cè)試技術(shù)研究院）熊文波（杭州愛(ài)華智能科技有限公司）閆磊（北京航天計(jì)量測(cè)試技術(shù)研究所）牛國(guó)輝（新疆維吾爾自治區(qū)計(jì)量測(cè)試研究院）PAGEI目錄引言 II1 范圍 12 引用文件 13 術(shù)語(yǔ)和計(jì)量單位 14 概述 15 計(jì)量特性 25.1 相頻響應(yīng) 25.2 相頻非線性誤差 25.3 相位一致性 26 校準(zhǔn)條件 26.1 環(huán)境條件 26.2 測(cè)量標(biāo)準(zhǔn)器及其他設(shè)備 27 校準(zhǔn)項(xiàng)目和校準(zhǔn)方法 37.1 校準(zhǔn)項(xiàng)目 37.2 校準(zhǔn)前檢查 37.3 相頻響應(yīng) 37.4 相頻非線性誤差 47.5 相位一致性 48 校準(zhǔn)結(jié)果表達(dá) 59 復(fù)校時(shí)間間隔 5附錄A校準(zhǔn)證書(shū)的內(nèi)容和格式 6附錄B測(cè)量不確定度評(píng)定示例 9

引言JJF1071《國(guó)家計(jì)量校準(zhǔn)規(guī)范編寫(xiě)規(guī)則》、JJF1001《通用計(jì)量術(shù)語(yǔ)及定義》、JJF1059.1《測(cè)量不確定度的評(píng)定與表示》共同構(gòu)成支撐本規(guī)范制定的基礎(chǔ)性系列規(guī)范。本規(guī)范為首次發(fā)布。測(cè)量傳聲器相頻特性校準(zhǔn)規(guī)范范圍本規(guī)范適用于測(cè)量傳聲器（包括工作標(biāo)準(zhǔn)傳聲器和電容式工程測(cè)量傳聲器）相頻響應(yīng)的校準(zhǔn)。其他類似傳聲器相頻特性的校準(zhǔn)參照使用。引用文件本規(guī)范引用下列文件：JJG175工作標(biāo)準(zhǔn)傳聲器（靜電激勵(lì)器法）檢定規(guī)程JJF1001通用計(jì)量術(shù)語(yǔ)及定義JJF1034聲學(xué)計(jì)量術(shù)語(yǔ)及定義JJF1059.1測(cè)量不確定度的評(píng)定與表示JJF1288多通道聲分析儀校準(zhǔn)規(guī)范GB/T3947聲學(xué)名詞術(shù)語(yǔ)GB/T20441.6-2017《電聲學(xué)測(cè)量傳聲器第6部分：用于測(cè)定頻率響應(yīng)的靜電激勵(lì)器》凡是注日期的引用文件，僅注日期的版本適用于本規(guī)范；凡是不注日期的引用文件，其最新版本（包括所有的修改單）適用于本規(guī)范。術(shù)語(yǔ)和計(jì)量單位上述引用文件界定的以及下列術(shù)語(yǔ)和定義適用于本規(guī)范。3.1靜電激勵(lì)器electrostaticactuator用于測(cè)定傳聲器頻率響應(yīng)的裝置，它包含一個(gè)置于傳聲器膜片附近的導(dǎo)電剛性平板，在平板和膜片間施加時(shí)變電壓，可產(chǎn)生均勻地分布在膜片表面上的模擬聲壓的靜電力。[來(lái)源：GB/T20441—2017IEC61094-6，定義3.1]3.2傳聲器相位在信號(hào)激勵(lì)下，測(cè)量傳聲器輸出信號(hào)的相位。注：本規(guī)范所述相頻響應(yīng)，特指采用靜電激勵(lì)器法測(cè)得的相位。3.3相頻響應(yīng)phaseresponse在信號(hào)激勵(lì)下，輸出、輸入信號(hào)的相位差隨頻率的變化。注：本規(guī)范所述相頻響應(yīng)，特指采用靜電激勵(lì)器法測(cè)得的相頻特性。3.4相位一致性phaseconsistency兩只或兩只以上傳聲器的相頻響應(yīng)的一致性。概述傳聲器是一種將聲波轉(zhuǎn)化為電信號(hào)或機(jī)械作用的器件，常用于聲音的傳輸與檢測(cè)，對(duì)機(jī)械尺寸和電聲性能有特定的要求。電容傳聲器是一種依靠電容量變化而起換能作用的傳聲器，具備廣泛的應(yīng)用場(chǎng)景。傳聲器相頻響應(yīng)主要是膜、聲結(jié)構(gòu)以及電路部分可能存在的延時(shí)導(dǎo)致的。利用靜電激勵(lì)器測(cè)量得到傳聲器相頻響應(yīng)，能夠不借助參考傳聲器評(píng)價(jià)相位一致性、頻散等特性。需要測(cè)量相頻響應(yīng)的傳聲器，通常用于聲強(qiáng)測(cè)量、多通道數(shù)據(jù)采集、聲成像系統(tǒng)以及高保真音質(zhì)評(píng)價(jià)系統(tǒng)校準(zhǔn)。計(jì)量特性相頻響應(yīng)傳聲器標(biāo)稱的頻率范圍內(nèi)，相頻響應(yīng)的測(cè)量重復(fù)性應(yīng)小于1.5°。相頻非線性誤差傳聲器標(biāo)稱的頻率范圍內(nèi)，聲壓靈敏度的相頻非線性最大允許誤差見(jiàn)表1。表1相頻非線性最大允許誤差頻率/Hz最大允許誤差/°壓力場(chǎng)傳聲器自由場(chǎng)傳聲器擴(kuò)散場(chǎng)傳聲器20~5005.05.05>500~100003.0//>10000~200005.0//相位一致性當(dāng)有兩只或兩只以上傳聲器配套使用時(shí)，在工作頻率范圍內(nèi)，同一組（對(duì)）傳聲器相位差值最大不能超過(guò)7.0°。注：以上技術(shù)要求不用于合格判定，僅供參考校準(zhǔn)條件環(huán)境條件傳聲器應(yīng)在以下環(huán)境條件下進(jìn)行校準(zhǔn)：溫度：（23±3）℃；相對(duì)濕度：（30～90）%；靜壓：（94~103）kPa；實(shí)驗(yàn)室及其周?chē)h(huán)境應(yīng)無(wú)影響測(cè)試準(zhǔn)確度的振動(dòng)和沖擊源。測(cè)量標(biāo)準(zhǔn)器及其他設(shè)備多通道聲分析儀信號(hào)發(fā)生器部分的頻率范圍應(yīng)覆蓋20Hz～40kHz，頻率示值誤差不超過(guò)±0.5%，總失真小于0.1%，相對(duì)于參考頻率（250Hz）的幅頻特性優(yōu)于±0.1dB，輸出信號(hào)電壓不低于5V。輸入端短路噪聲低于10μV（線性），總失真小于0.1%，相頻非線性誤差小于±0.1°。靜電激勵(lì)器在參考頻率上（250Hz），其響應(yīng)的重復(fù)性優(yōu)于0.04dB。前置放大器使用頻率范圍內(nèi)，輸入端短路噪聲低于10μV（線性），3μV（A計(jì)權(quán)）。校準(zhǔn)項(xiàng)目和校準(zhǔn)方法校準(zhǔn)項(xiàng)目傳聲器相位的校準(zhǔn)項(xiàng)目見(jiàn)表2。不同類型傳聲器可根據(jù)實(shí)際情況選擇部分校準(zhǔn)項(xiàng)目。表2校準(zhǔn)項(xiàng)目一覽表序號(hào)項(xiàng)目名稱技術(shù)要求的條款號(hào)校準(zhǔn)方法的條款號(hào)1相頻響應(yīng)5.17.32相頻非線性誤差5.27.43相位一致性5.37.5校準(zhǔn)前檢查校準(zhǔn)前應(yīng)對(duì)傳聲器進(jìn)行以下檢查，并完整記錄，必要時(shí)在校準(zhǔn)報(bào)告中描述：是否存在影響正常工作及讀數(shù)的機(jī)械性損傷或變形；是否存在接觸不良等現(xiàn)象。相頻響應(yīng)圖1相頻響應(yīng)測(cè)量裝置示意圖相頻響應(yīng)測(cè)量裝置方框圖見(jiàn)如圖1所示。相頻響應(yīng)測(cè)量步驟如下：調(diào)節(jié)多通道聲分析儀，根據(jù)被校傳聲器要求設(shè)置傳聲器靈敏度、極化電壓等參數(shù)。取掉被校傳聲器保護(hù)柵，將靜電激勵(lì)器置于傳聲器表面上，使其參考軸處于與水平面成90°角的位置。調(diào)節(jié)多通道聲分析儀發(fā)生的信號(hào)幅度，使在被檢頻率范圍內(nèi)，靜電激勵(lì)器的幅值響應(yīng)級(jí)高于環(huán)境噪聲聲壓級(jí)25dB以上。采用步進(jìn)正弦線性掃頻方法（SSR）測(cè)量，掃頻點(diǎn)數(shù)為400個(gè)，記錄多通道聲分析儀的相頻響應(yīng)數(shù)據(jù)，將不同頻率點(diǎn)位上的輸出相位記為θf(wàn)i取下靜電激勵(lì)器，改變傳聲器和靜電激勵(lì)器相對(duì)耦合位置，分別轉(zhuǎn)動(dòng)靜電激勵(lì)器約120°和240°，重復(fù)測(cè)量步驟a）~d），每個(gè)頻率點(diǎn)均取3次測(cè)量的算術(shù)平均值作為該頻率點(diǎn)的相位。θ式中：n——測(cè)量次數(shù)；θf(wàn)i——某頻率下的相位值，°根據(jù)不同頻率點(diǎn)的相位，即可得到被檢傳聲器的相頻響應(yīng)。相頻非線性誤差在線性坐標(biāo)軸上采用最小二乘法將頻率響應(yīng)曲線擬合為一條直線，計(jì)算公式如（2）所示。β式中：z——線性頻率點(diǎn)數(shù)；xf——頻率點(diǎn)，Hzθf(wàn)——某頻率下的相位，°yf——擬合的某頻率下的相位，°根據(jù)公式（2）計(jì)算處各線性頻率點(diǎn)上的值記為Yf按公式（3）計(jì)算相頻非線性誤差e=相位一致性若有兩只或兩只以上配套使用的傳聲器，重復(fù)7.3的測(cè)量步驟得到每一只傳聲器被檢頻率范圍內(nèi)的相位θf(wàn)m，按公式（4）計(jì)算每個(gè)頻率點(diǎn)上的相位εf式中：k——傳聲器個(gè)數(shù)；應(yīng)采用其他符號(hào)，與上文區(qū)分εf——多個(gè)傳聲器相位的平均值，°按公式（5）計(jì)算不同頻率上的相位一致性：δ=校準(zhǔn)結(jié)果表達(dá)校準(zhǔn)數(shù)據(jù)處理所有的數(shù)值應(yīng)先計(jì)算，后修約。出具的校準(zhǔn)數(shù)據(jù)均保留一位小數(shù)。校準(zhǔn)證書(shū)應(yīng)為校準(zhǔn)的傳聲器出具校準(zhǔn)證書(shū)。校準(zhǔn)證書(shū)應(yīng)包括的信息及推薦的校準(zhǔn)證書(shū)的內(nèi)頁(yè)格式見(jiàn)附錄A。校準(zhǔn)結(jié)果的測(cè)量不確定度傳聲器相位校準(zhǔn)的測(cè)量不確定度應(yīng)按JJF1059.1的要求評(píng)定，不確定度評(píng)定的示例見(jiàn)附錄B。復(fù)校時(shí)間間隔建議傳聲器相位復(fù)校時(shí)間間隔為一年。然而，復(fù)校時(shí)間間隔的長(zhǎng)短取決于儀器的使用情況（使用部位的重要性、環(huán)境條件、使用頻率）、使用者、儀器本身質(zhì)量等諸多因素，因此，送校單位可根據(jù)實(shí)際使用情況自主決定復(fù)校時(shí)間間隔。

附錄A校準(zhǔn)證書(shū)的內(nèi)容和格式A.1傳聲器相位的校準(zhǔn)證書(shū)至少應(yīng)包括以下信息：標(biāo)題，如“校準(zhǔn)證書(shū)”；校準(zhǔn)實(shí)驗(yàn)室的名稱和地址；進(jìn)行校準(zhǔn)的地點(diǎn)（如果與校準(zhǔn)實(shí)驗(yàn)室的地址不同）；證書(shū)的唯一性標(biāo)識(shí)（如編號(hào)），頁(yè)碼及總頁(yè)數(shù)的標(biāo)識(shí)；客戶的名稱和地址；被校對(duì)象的描述和明確標(biāo)識(shí)（如型號(hào)、性能等級(jí)、類型標(biāo)識(shí)及出廠編號(hào)等）；進(jìn)行校準(zhǔn)的日期；本技術(shù)規(guī)范的標(biāo)識(shí)，包括名稱及編號(hào)；本次校準(zhǔn)所用測(cè)量標(biāo)準(zhǔn)的溯源性及有效性的說(shuō)明；校準(zhǔn)環(huán)境的描述；校準(zhǔn)結(jié)果及其測(cè)量不確定度的說(shuō)明；校準(zhǔn)人簽名、核驗(yàn)人簽名、批準(zhǔn)人簽名；校準(zhǔn)結(jié)果僅對(duì)被校對(duì)象有效的聲明；未經(jīng)實(shí)驗(yàn)室書(shū)面批準(zhǔn)，不得部分復(fù)制證書(shū)的聲明。A.2推薦的傳聲器相位校準(zhǔn)證書(shū)的內(nèi)頁(yè)格式見(jiàn)圖A.1。證書(shū)編號(hào)××××××－××××證書(shū)編號(hào)××××××－××××校準(zhǔn)機(jī)構(gòu)授權(quán)說(shuō)明校準(zhǔn)的技術(shù)依據(jù)JJFXXXXXX-XXXX傳聲器相位校準(zhǔn)規(guī)范校準(zhǔn)環(huán)境條件及地點(diǎn)空氣溫度℃相對(duì)濕度%靜壓kPa地點(diǎn)校準(zhǔn)使用的計(jì)量（基）標(biāo)準(zhǔn)裝置名稱測(cè)量范圍不確定度/準(zhǔn)確度等級(jí)/最大允許誤差計(jì)量（基）標(biāo)準(zhǔn)證書(shū)編號(hào)有效期至校準(zhǔn)使用的標(biāo)準(zhǔn)器名稱測(cè)量范圍不確定度/準(zhǔn)確度等級(jí)/最大允許誤差檢定/校準(zhǔn)證書(shū)編號(hào)有效期至第×頁(yè)共×頁(yè)圖A.1校準(zhǔn)證書(shū)內(nèi)頁(yè)的格式

證書(shū)編號(hào)××××××－××××證書(shū)編號(hào)××××××－××××校準(zhǔn)結(jié)果1相頻響應(yīng):頻率f/Hz202531.540506380100125相位θ/°頻率f/Hz1602002503154005006308001000相位θ/°頻率f/Hz125016002000250031504000500063008000相位θ/°頻率f/Hz10000125001600020000相位θ/°2相頻非線性誤差:20Hz~Hz范圍內(nèi)，相頻非線性誤差為°。3相位一致性:頻率f/Hz202531.540506380100125相位差φ/°頻率f/Hz1602002503154005006308001000相位差φ/°頻率f/Hz125016002000250031504000500063008000相位差φ/°頻率f/Hz10000125001600020000相位差φ/°以下空白。第×頁(yè)共×頁(yè)圖A.1校準(zhǔn)證書(shū)內(nèi)頁(yè)的格式（續(xù)）

附錄B測(cè)量不確定度評(píng)定示例B.1測(cè)量方法相位非線性誤差計(jì)算公式為：e=式中：θf(wàn)——某頻率下的相位，°yf——擬合的某頻率下的相位，°B.2測(cè)量不確定度來(lái)源相位非線性誤差的不確定度來(lái)源主要包括：測(cè)量重復(fù)性、靜電激勵(lì)器直流電壓、靜電激勵(lì)器安裝位置、數(shù)據(jù)修約。其中測(cè)量重復(fù)性采用A類方法評(píng)定，其他各項(xiàng)采用B類方法評(píng)定。B.2.1測(cè)量重復(fù)性引入的不確定度測(cè)量重復(fù)性引入的不確定度采用A類方法評(píng)定。相位非線性誤差的測(cè)量結(jié)果見(jiàn)表B.1,以其標(biāo)準(zhǔn)偏差作為A類不確定度分量uA。表B.1相頻響應(yīng)頻率/Hz第1次/°第2次/°第3次/°第4次/°第5次/°第6次/°標(biāo)準(zhǔn)偏差/°20.002.312.272.272.242.272.250.0270.082.302.262.262.232.262.240.02120.152.332.802.292.142.192.140.25170.232.402.452.532.542.232.360.12220.302.442.452.402.212.352.320.09270.382.492.502.642.452.432.460.08320.452.512.471.392.452.412.410.43370.532.532.341.762.472.482.400.29420.602.472.442.272.432.452.210.11470.682.472.362.292.392.382.410.06520.751.642.392.412.392.392.400.31570.831.282.412.375.532.372.301.45620.902.312.253.312.352.182.320.42670.982.292.282.652.092.272.280.18721.052.372.252.562.222.372.240.13771.131.962.232.462.172.182.250.16821.201.772.192.342.302.182.150.20871.282.222.111.442.152.162.100.29921.352.112.163.272.142.052.110.47971.432.131.961.982.042.112.040.071021.502.082.092.292.012.022.020.111071.582.042.222.001.992.031.980.091121.652.011.931.961.921.971.960.031171.731.971.961.881.981.951.910.041221.801.961.952.291.731.971.880.181271.881.921.841.871.801.871.840.041321.951.851.811.931.611.841.780.111372.031.841.651.891.651.761.770.101422.111.781.731.701.531.731.730.091472.181.781.701.461.551.781.680.131522.261.721.770.961.651.701.630.311572.331.761.931.271.611.681.560.221622.411.621.571.351.571.601.560.101672.481.491.571.141.521.571.560.171722.561.551.511.121.541.581.540.171772.631.531.471.371.491.491.500.051822.711.481.471.361.411.481.440.051872.781.411.401.641.371.431.400.101922.861.401.421.361.451.381.350.041972.931.421.091.721.191.371.350.222023.011.351.541.021.301.321.310.162073.081.321.311.511.241.281.250.102123.161.281.271.211.191.241.220.032173.231.231.221.091.201.191.160.052223.311.181.131.151.141.161.140.022273.381.161.121.131.091.091.060.042323.461.181.111.381.031.101.070.132373.531.111.010.921.081.081.050.072423.611.051.010.900.981.421.010.182473.681.030.991.101.051.130.990.062523.761.020.910.850.990.970.920.062573.830.980.910.680.920.880.920.102623.910.920.911.770.860.780.860.372673.990.900.880.610.730.760.820.112724.060.870.800.750.850.760.800.052774.140.780.790.740.710.810.750.042824.210.790.800.761.020.700.730.112874.290.740.660.810.700.720.680.052924.360.710.660.670.650.690.650.022974.440.700.700.550.650.630.610.063024.510.630.580.600.610.590.540.033074.590.620.600.140.690.540.560.203124.660.580.531.840.530.550.350.553174.740.540.521.330.350.490.560.353224.810.510.490.510.430.440.430.043274.890.470.470.380.470.440.420.043324.960.480.470.430.330.390.370.063375.040.400.330.410.370.390.340.033425.110.410.370.530.350.310.340.083475.190.320.340.160.230.290.270.063525.260.310.270.440.240.270.240.083575.340.240.240.370.130.230.200.083625.410.240.220.280.230.200.200.033675.490.220.190.190.130.160.140.033725.560.180.11-0.450.190.150.030.243775.640.140.120.380.070.100.090.123825.710.100.07-0.090.010.110.020.073875.790.060.04-0.370.030.010.030.163925.860.070.020.01-0.040.000.010.043975.940.030.040.12-0.09-0.02-0.030.074026.02-0.01-0.04-0.22-0.010.01-0.100.094076.09-0.02-0.090.02-0.14-0.09-0.060.064126.17-0.08-0.13-0.03-0.11-0.12-0.160.054176.24-0.09-0.20-0.24-0.19-0.17-0.160.054226.32-0.08-0.15-0.20-0.20-0.16-0.190.054276.39-0.16-0.29-0.20-0.24-0.20-0.220.044326.47-0.17-0.24-0.26-0.28-0.23-0.260.044376.54-0.19-0.29-0.27-0.26-0.29-0.270.044426.62-0.22-0.31-0.29-0.32-0.30-0.310.044476.69-0.23-0.32-0.24-0.31-0.30-0.340.044526.77-0.28-0.35-0.34-0.16-0.34-0.370.084576.84-0.30-0.39-0.38-0.33-0.38-0.400.044626.92-0.33-0.43-0.58-0.49-0.41-0.430.084676.99-0.35-0.43-0.43-0.47-0.42-0.460.044727.07-0.36-0.50-0.45-0.48-0.44-0.480.054777.14-0.41-0.58-0.33-0.51-0.46-0.510.094827.22-0.45-0.48-0.54-0.53-0.50-0.540.044877.29-0.48-0.49-0.54-0.56-0.49-0.560.044927.37-0.50-0.58-0.60-0.62-0.58-0.600.044977.44-0.56-0.44-0.59-0.62-0.59-0.610.075027.52-0.58-0.95-0.50-0.66-0.62-0.670.155077.59-0.60-0.67-0.67-0.68-0.64-0.670.035127.67-0.62-0.63-0.66-0.71-0.68-0.700.045177.74-0.63-0.65-0.68-0.72-0.67-0.720.045227.82-0.67-0.68-0.76-0.77-0.73-0.750.045277.89-0.72-0.77-0.72-0.86-0.77-0.780.055327.97-0.71-0.83-0.78-0.78-0.79-0.790.045378.05-0.74-0.82-0.75-0.83-0.82-0.820.045428.12-0.76-0.95-0.83-0.87-0.83-0.850.065478.20-0.82-0.86-0.87-0.90-0.87-0.860.035528.27-0.80-0.83-0.86-0.94-0.89-0.870.055578.35-0.82-0.96-0.91-0.95-0.94-0.910.055628.42-0.88-0.94-0.88-0.96-0.92-0.930.035678.50-0.88-0.98-0.96-0.98-0.97-0.970.045728.57-0.91-0.99-1.17-0.99-0.98-1.000.095778.65-0.93-1.03-0.89-1.07-1.00-1.010.075828.72-0.99-0.99-1.04-1.18-1.00-1.030.075878.80-0.95-1.02-0.92-1.14-1.05-1.060.085928.87-1.07-1.12-0.99-1.11-1.07-1.090.055978.95-1.01-1.11-1.11-1.03-1.09-1.140.056029.02-1.04-1.09-1.11-1.12-1.12-1.100.036079.10-1.05-1.09-1.10-1.16-1.13-1.170.056129.17-1.06-1.13-1.16-1.17-1.14-1.160.046179.25-1.11-1.11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