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基于X射線相襯成像技術(shù)的光柵品質(zhì)無(wú)損檢測(cè)（英文）Title:Non-destructiveTestingofGratingQualityBasedonX-rayPhaseContrastImagingTechniqueAbstract:Thenon-destructivetestingofgratingqualityplaysacrucialroleinvariousindustries,includingprecisionmanufacturing,semiconductorfabrication,andopticalengineering.Traditionaltestingmethodsofteninvolvephysicalcontactordestructivetechniques,whichcandamagethegratingsoraltertheirproperties.Inrecentyears,X-rayphasecontrastimaging(XPCI)hasemergedasapromisingtechniquefornon-destructivetesting.ThispaperaimstoexploretheapplicationofXPCIinthenon-destructivetestingofgratingqualityanddiscussitsadvantagesandlimitations.1.Introduction1.1Background1.2SignificanceofNon-destructiveTestingofGratingQuality1.3OverviewofX-rayPhaseContrastImagingTechnique2.PrinciplesofX-rayPhaseContrastImaging2.1Absorption-basedX-rayImaging2.2Phase-basedX-rayImaging2.3TheoryandPrinciplesofXPCI3.ExperimentalSetupforNon-destructiveTestingofGratingQuality3.1X-raySourceandDetector3.2GratingSamplePreparation3.3ImagingParametersandDataAcquisition3.4ImageProcessingandAnalysis4.AdvantagesofX-rayPhaseContrastImaginginGratingQualityEvaluation4.1ImprovedContrastandVisibility4.2AbilitytoDetectSubtleDefects4.3QuantitativeAnalysisofGratingParameters4.4Non-destructiveTestingCapability5.LimitationsofX-rayPhaseContrastImagingTechnique5.1LimitationsinSpatialResolution5.2X-raydoseandSafetyConcerns5.3LimitedDepth-of-Field6.ApplicationsofX-rayPhaseContrastImaginginGratingQualityEvaluation6.1InspectionofPeriodicityandAlignment6.2IdentificationofSurfaceDefects6.3CharacterizationofGeometricParameters6.4EvaluationofMaterialProperties7.ComparisonwithConventionalTestingTechniques7.1AdvantagesofX-rayPhaseContrastImagingoverTraditionalTechniques7.2LimitationsandChallengesinImplementingXPCI8.FutureDirectionsandResearchOpportunities8.1ImprovementsinSpatialResolution8.2DevelopmentofAdvancedX-raySourcesandDetectors8.3IntegrationofImageProcessingandArtificialIntelligence8.4ExtendingXPCItoReal-timeandIn-situTesting9.Conclusion9.1SummaryofFindings9.2EvaluationofX-rayPhaseContrastImagingTechniqueforGratingQualityEvaluation9.3FuturePerspectivesandRecommendationsReferencesNote:Thewordcountofthisoutlineisapproximately280words.

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