微摩擦論文基于光纖傳感器的微摩擦-微粘著測(cè)試儀性能研究

1、 微摩擦論文：基于光纖傳感器的微摩擦/微粘著測(cè)試儀性能研究【中文摘要】微摩擦/微粘著測(cè)試儀是針對(duì)微觀條件下摩擦及粘著現(xiàn)象開(kāi)發(fā)的測(cè)試裝置,能夠有效測(cè)量微牛至毫牛范圍內(nèi)的摩擦力和粘著力,反映材料間的摩擦和粘著特性,為微機(jī)電系統(tǒng)中微摩擦磨損特性研究提供試驗(yàn)手段。本文在先期研制的微摩擦/微粘著測(cè)試儀的基礎(chǔ)上,針對(duì)振動(dòng)干擾影響較大和步進(jìn)電機(jī)間歇運(yùn)動(dòng)等問(wèn)題,對(duì)信號(hào)處理、步進(jìn)電機(jī)控制和壓電陶瓷控制等問(wèn)題進(jìn)行了分析和研究,采用復(fù)合濾波、閉環(huán)控制和復(fù)合加載等方法對(duì)測(cè)試儀進(jìn)行改進(jìn),進(jìn)一步提高了儀器的測(cè)試精度和穩(wěn)定性,主要研究工作有：(1)采用鈹青銅為材料制作彈性敏感元件,并進(jìn)行了有限元分析和標(biāo)定,優(yōu)化了元件的剛度

2、系數(shù)和輸入輸出線(xiàn)性,增強(qiáng)了測(cè)試儀的靈敏度。(2)對(duì)不同工況條件下的載荷及摩擦力電壓信號(hào)進(jìn)行時(shí)域、頻域和小波分析,研究了噪聲和振動(dòng)干擾信號(hào)特點(diǎn),采用均值濾波、滑動(dòng)濾波和小波去噪組成的復(fù)合濾波方法進(jìn)行處理,有效地減弱了外界振動(dòng)干擾和噪聲的影響。(3)分析了法向步進(jìn)電機(jī)加載方式下的靜態(tài)及動(dòng)態(tài)加載誤差,通過(guò)構(gòu)建PID閉環(huán)控制系統(tǒng)實(shí)現(xiàn)閉環(huán)加載控制,減少了加載誤差,提高了載荷加載精度。(4)研究了壓電陶瓷的遲滯和非線(xiàn)性等固有特性,在前饋開(kāi)環(huán)控制誤差分析的基礎(chǔ)上,對(duì)壓電陶瓷采用位移閉環(huán)控制,獲得了較高的位移輸出精度。(5)采用步進(jìn)電機(jī)和壓電陶瓷實(shí)現(xiàn)復(fù)合加載,滿(mǎn)足了不同加載要求,通過(guò)微摩擦力測(cè)試實(shí)驗(yàn)和微粘著力

3、測(cè)試實(shí)驗(yàn),驗(yàn)證了測(cè)試儀穩(wěn)定性和可靠性。【英文摘要】The Micro friction & Micro adhesion tester is a test device developed for friction and adhesion phenomenon under the microscopic condition, which can effective measure friction force and adhesive force in the range of Micro cattle and Backhoe cattle, also can reflect the

4、 properties of friction and adhesion among the materials. And it provides testing methods to micro friction attrition properties for MEMS (micro electro mechanical system).Based on the advance development of micro friction & micro adhesion tester, the paper analyzes and researches the problem of

5、 signal processing, stepping motor control and piezoelectric ceramic control, which is against to the problem of great influence of vibration and intermittent movement of stepping motor. It used methods of composite filtering、closed loop control and composite loading to improve the tester, which is

6、able to enhance the testing accuracy and stability. The main research work is showed as follows:(1) Use beryllium bronze for material produced elastic sensitive components; Process finite-element analysis and demarcation; Optimize the stiffness coefficient and in-out linear of component; Improve sen

7、sitivity of tester.(2) Analyze the frequency domain, time domain and wavelet for test signals of micro friction under of different working condition; According to signal characteristic, use the methods such as average filtering, sliding filter and wavelet de-noising for digital filtering, to filter

8、external vibration interference and noise.(3) Analyze the loading errors of static and dynamic with step-motor loading method; Construct the PID closed-loop control system to reduce loading errors and improve load precision.(4) Research on the retardation and non-linear characteristics of piezoelect

9、ric ceramic; Control piezoelectric ceramic by adopting the way of feed forward open loop and displacement closed loop; Acquire higher precision of displacement output.(5) Adopt the composite loading with the stepping motor and piezoelectric ceramic to satisfy the different loading acquirement; Take

10、the experiment of micro friction force test and micro adhesion force test to prove the stability and reliability of tester.【關(guān)鍵詞】微摩擦 微粘著 測(cè)試儀 復(fù)合加載 復(fù)合濾波【英文關(guān)鍵詞】Micro friction Micro adhesion Tester Complex loading Compound filter【目錄】基于光纖傳感器的微摩擦/微粘著測(cè)試儀性能研究摘要3-4ABSTRACT4-5第1章 緒論9-161.1 研究背景及意義91.2 國(guó)內(nèi)外研究現(xiàn)狀9

11、-111.3 微摩擦/微粘著測(cè)試儀11-141.3.1 基本結(jié)構(gòu)11-121.3.2 測(cè)力單元121.3.3 進(jìn)給單元12-131.3.4 測(cè)試系統(tǒng)13-141.4 本文研究?jī)?nèi)容14-16第2章 信號(hào)分析與處理16-382.1 數(shù)據(jù)采集系統(tǒng)16-192.1.1 軟件開(kāi)發(fā)平臺(tái)16-172.1.2 光纖傳感器17-192.1.3 數(shù)據(jù)采集卡192.2 測(cè)試信號(hào)分析19-312.2.1 時(shí)域分析19-202.2.2 頻譜分析20-242.2.3 小波分析24-312.3 數(shù)字信號(hào)濾波31-372.3.1 均值濾波32-332.3.2 平滑濾波33-342.3.3 小波去噪34-372.4 本章小結(jié)3

12、7-38第3章 步進(jìn)電機(jī)控制38-473.1 步進(jìn)電機(jī)控制系統(tǒng)38-393.1.1 步進(jìn)電機(jī)383.1.2 電機(jī)驅(qū)動(dòng)器38-393.1.3 運(yùn)動(dòng)控制卡393.2 步進(jìn)電機(jī)開(kāi)環(huán)控制39-423.2.1 靜態(tài)加載誤差分析39-403.2.3 動(dòng)態(tài)加載誤差分析40-423.3 步進(jìn)電機(jī)閉環(huán)控制42-453.3.1 PID控制原理42-433.3.2 數(shù)字PID控制43-443.3.3 加載誤差分析44-453.4 本章小結(jié)45-47第4章 壓電陶瓷控制47-604.1 壓電陶瓷控制系統(tǒng)47-484.1.1 壓電陶瓷474.1.2 裝夾裝置47-484.1.3 驅(qū)動(dòng)電源484.2 壓電陶瓷輸出特性48-514.2.1 工作原理48-494.2.2 基本特性49-504.2.3 輸出特性50-514.3 壓電陶瓷精確控制51-594.3.1 前饋開(kāi)環(huán)控制52-