硅烷化學性質(zhì)

硅烷化學性質(zhì)第1頁，共24頁，2023年，2月20日，星期二SilanePropertiesLatentHeatofVaporizationis388kJ/kgatBoilingPoint(-112.5?C)VaporSpecificDensityis1.12,i.e.heavierthanairGasSpecificVolume:750cc/g@21?CAutoignitionTemperature:-50?Cto-100?C(variesdependingsourceofdata)Flammability(LFL-UFL)1.37%-96%OxidizetoamorphousSiliconDioxideThermallyStableupto420?CSlightlysolubleinwaterTestsbyAirProductsinTaiwanin2006PhotosfrompresentationbyEugeneNgai,ChemicallySpeakingLLC第2頁，共24頁，2023年，2月20日，星期二SilaneOxidationOxidationmaybeincompletedependingonavailableoxygen.BrownsmokeandadullorangeflameisanindicationofincompleteoxidationSiH4+O2SiO2+2H2SiH4+2O2SiO2+H2OSiH4+O2SiH2O+H2OSiH4+?O2SiH2O+H2

SiH2O+O2SiO2+H2OBrownresidueisreactive&pyrophoric,typicallysiliconoxyhydrideSiH2OwhichcanalsoabsorbhydrogenWhitedustissilicondioxideandisinert第3頁，共24頁，2023年，2月20日，星期二Fire,Explosion,Oxidation?LeaksofsilanecanoxidiseinairwithoutobvioussignsofignitionLeakscanalsoresultinflames,withtheseveritydependingontheleakholesize,ventilationandcontainment“Poppers”canoccurwhenasmallamountofsilaneleaksintospacebetweenvalveandcapduringstorage&transitWhenasilaneleakiscontainedandconcentrationexceeds4.5%thendelayedignitionandabulkautoignitionoccursPhotosfrompresentationbyEugeneNgai,ChemicallySpeakingLLC第4頁，共24頁，2023年，2月20日，星期二EmergencyResponseScenarioGasLeakisdetected&alarmraised1stResponderindicatesnovisiblesignofgasleak,noflamedetection,nosprinkleractivationDecidestoopencabinetandclosecylindervalveWhathappensnext?第5頁，共24頁，2023年，2月20日，星期二GasCabinetTest

May2006,TaiwanHighpressureSilanewasventedintothegascabinetthrougha?”tubewithoutignition,mixingwith300cfmofairinthecabinet.ThemetastablemasswasignitedatthevalveoutletbyanabruptshutoffofSilaneflowSubsequentreactionisdescribedasarapiddeflagrationandwerecapturedbyhighspeedcamerashowingeventsjustafterignitionTestsbyAirProductsinTaiwanin2006PhotosfrompresentationbyEugeneNgai,ChemicallySpeakingLLC第6頁，共24頁，2023年，2月20日，星期二GasCabinetTest

May2006,Taiwan第7頁，共24頁，2023年，2月20日，星期二GasCabinetTest-May2006,Taiwan第8頁，共24頁，2023年，2月20日，星期二IgnitionatShutOffThephenomenonofignitionatshutoffisnotfullyunderstood,butitexistsandisasignificantriskforsilanegascabinetusersUsingautomatednormallyclosedpneumaticallyheldopencylindervalveslinkedtogasleakdetectioncanminimisetheimpactofagasleakandreducetheriskofinjurytopersonnel第9頁，共24頁，2023年，2月20日，星期二SilanePropertiesPyrophoricIgnitiondependsonvariousparametersincludingpressureofrelease,concentrationventilationconditionsSilaneexplosionsareoftenresultinseveredamageorinjuryAssumingleakscannotbeavoided,promptignitionisthedesigngoal,providingastable,controllablesituationforfireprotectionandemergencyresponsePhotosfrompresentationbyEugeneNgai,ChemicallySpeakingLLC第10頁，共24頁，2023年，2月20日，星期二SilaneIncidentsInthelast20years,anumberofmajorincidentshaveoccurredduringSilaneuseReleaseanddetonationofgascabinetReleaseanddetonationofductReleaseandfireExplosionofcylinderReactionofsolidby-productsPressurereliefdeviceleakAluminumcylinderrupture第11頁，共24頁，2023年，2月20日，星期二CausesofIncidentsConnectionLeaksFailuretocaplineduringmaintenanceCheckvalvefailureRegulatorDiaphragmfailureImproperPRDdesignCylindercontaminationwithNitrousOxideOperatorremoveswrongcylinder第12頁，共24頁，2023年，2月20日，星期二ConnectionLeaksMechanicalconnectionsthatareremovedperiodicallyorphysicallystressedarethemostvulnerablepartofaSilanesystem.Cylinderconnectionorthepigtailconnectiontothegaspanelarethemostcommonleakpointsdueto;PhysicalimpactWrongorpreviouslyusedgasketCorrodedBeadNotenoughortoomuchtorqueColdFlow(PTFEGasket)WorkHarden(CGA350)LowleakcheckpressureElastomerGasketcoldflowedandleakedresultinginfireandgascabinetsprinkleractivation.PhotofrompresentationbyEugeneNgai,ChemicallySpeakingLLC第13頁，共24頁，2023年，2月20日，星期二GasCabinetExplosionsIncidentsreportedwhereSilanewasreleasedintoagascabinetwithoutimmediateignitionandexplodedafteradelayGermany,1976–1fatalityJapan1989,1fatality&1injuryJapan,Dec.13,1990–1fatality&3injuriesUS,Jan1992–1injury–Japan,Dec.21,1996–1fatalityUSDeptofEnergy,DateUnknown–noinjuriesUS,2003,noinjuriesTaiwan,Nov23,2005–1fatalityIndia,March2007–1fatalityChina,August2009–Noinjuriesreported第14頁，共24頁，2023年，2月20日，星期二SilaneLeakandExplosion

1977,USAApiggybacktrailercontaining20cylindersofSilaneand28drumsofantifreezeexplodedasthetrainwasmovingat70mphA5kgcylinderleakedintothetrailerandexplodedatsomepointThesidesandroofofthetrailerwereblownout.17cylindersand4drumswerethrownoutofthetrailer第15頁，共24頁，2023年，2月20日，星期二PVIndustrySilaneExplosion,ChangshaChina17thAugust2009Duringinstallationofafull10kgcylinderintoa2cylindergascabinet,therewasareleaseofsilanefromthecylinderthatwasonline.Flamesimpingeddirectlyontothecylinderfromthepigtail.ThisheatedthecylinderforsomeperiodoftimeanditrupturedAnimmediateevacuationoccurred,probablypreventingseriousinjuryorfatalities.Silanethenignitedanddetonatedblowingoutwindowsonallsidesofthe3storey1,000m2metalframebuilding.Metalwallsontheprocesssidewereblownout.Therewasnofireafterwards35cylindersofsilaneintheareawereknockedoverbytheblast.Twostartedtoleak.Oneleakwassealedbyfacilitypersonnel.Thesecondleakcouldnotbestoppedandwasplacedinafield1000mawaybythefiredepartment第16頁，共24頁，2023年，2月20日，星期二PVIndustrySilaneExplosion

Taiwan,23rdNovember2005Silanewasreleasedfromafullcylinderduringacylinderresultinginacatastrophicexplosionfatallyinjuringtheoperatorandrupturingthecabinet.OthersilaneandAmmoniacylindersinthegasroomalsostartedtoreleasetheircontentsApprox10kgsofsilanereleasedOperatorfatallyinjuredSignificantfiredamageincludingfirespreadthroughplasticductsComplexrecoveryoperationforotherleakingcylindersofNH3andCH43monthsbusinessinterruptionreported第17頁，共24頁，2023年，2月20日，星期二SilaneExplosion

Industry,India,March2007FatalexplosioninvolvingleakofsilanegasintogascabinetwhichignitedwhenoperatoropenedthecabinetdoorDescribedbyoneexperiencedgassafetyprofessionalastheworstincidentofitstypehehadcomeacross第18頁，共24頁，2023年，2月20日，星期二DesignElementsofaSilaneDistributionSystemSilaneGasSafetySystem

EmergencyShutOffValveAutomaticCylinderValvePreferred

LocalESOVsateachpointofthesystemRemoteEMOtoactivatetheSilaneGasSafetySystem

ExcessFlowValveorSwitchOverpressureProtectionforSilaneDistributionSystem第19頁，共24頁，2023年，2月20日，星期二DesignElementsofaSilaneDistributionSystemWatersprayorsprinklerheadprotectiontocooltheSilanecylinderFlameDetection

BarrierstoseparateconnectedSilanecylindersSecurecylindersGasLeakDetection第20頁，共24頁，2023年，2月20日，星期二RestrictiveFlowOrificeThe“RFO”isusedtolimitthemaximumflowfollowingacatastrophicincidentdownstreamTypicallyinstalledincylindervalveIncreaseslikelihoodofpromptignitionAllowscabinetventilationtobedesignedtodiluteadefinedmaximumflowrateofsilane第21頁，共24頁，2023年，2月20日，星期二EffectofanRFOReleasefrom15kgSilanecylinderA0.25mmorificerestrictsflameto0.3mWith