濕氧系統(tǒng)中英對照操作手冊(基本操作)

1、操作手冊目錄Preface.序言 .IIITempress documentation set.文件設(shè)置.IIIUser Definition.用戶定義.IVNotes, Cautions and Warnings.注意，小心，警告.VContents description.VIRevision History.VI1. Introduction.1-11.1General.1-11.2Operator area description.1-22. Safety.2-22.1Emergency Off (EMO).2-22.2Alarm Signals.2-22.2.1Buzzer / LE

2、D.2-22.2.2Touchscreen.2-22.2.3Light tower.2-32.2.4TSC Alarm menu.2-32.3Light tower signal description (optional).2-32.4Toxic Material.2-52.5Safety measures.2-53. Operator Instructions.2.5-13.1Load or Unload process wafers.3.1-13.1.1Load process wafers.3.1-13.1.2Unload wafers.3.1-13.2Selecting a new

3、process recipe.3.2-13.2.1Touchscreen.3.2-13.2.2TSC-2.3.2-33.3Start/Continue a new process recipe.3.3-13.3.1Touchscreen.3.3-13.3.2TSC-2.3.3-23.4Stop a running process recipe.3.4-13.4.1Touchscreen.3.4-13.4.2TSC-2.3.4-23.5Abort a running process recipe.3.5-13.5.1Touchscreen.3.5-13.5.2TSC-2.3.5-23.6Clea

4、r Alarms.3.6-13.6.1Required action.3.6-13.6.2Touchscreen.3.6-13.6.3TSC-2.3.6-2Preface序言This set of manuals explains how to operate a Horizontal Diffusion/LPCVD furnace. 這套手冊是操作水平擴(kuò)散爐 / LPCVD 的說明。Refer to the Touchscreen reference manual (M440.01) or the TSC-2 reference manual (M450.03) for a full des

5、cription of all operating screens.觸摸屏參考手冊 (M440.01) 和TSC-2參考手冊是操作觸摸屏的說明。工藝手冊是工藝過程的信息。The Tempress Horizontal Diffusion Furnaces are fully described in the reference manuals (M300 series).參考手冊 (M300 series).是描述 Tempress水平擴(kuò)散爐的。Tempress documentation set 文件設(shè)置The complete Tempress documentation set incl

6、udes:全部的文件包括? Safety manual安全手冊? Operator manual 操作手冊? Reference manuals 參考手冊1. Loadstation 裝載區(qū)2. Furnace 爐子3. Gas cabinet 氣柜4. Main Power cabinet 電源柜5. DPC6. DTC7. Touchscreen 觸摸屏8. TSC-2 (+ optional SECS/GEM)? Vendor documentation賣主文件Delivery s on request:按要求交付? Desired vendor documentation? Sic a

7、nd Quartz drawings Sic和石英器件的圖紙? RS422 protocol (DPC/DTC)User Definition 用戶定義It is strongly recommended that all users first read this manual before starting any procedure. To produce an accessible manual suiting on various responsibilities, Tempress defines the following users:特別建議開始所有程序之前，先看這本手冊。為不

8、同職責(zé)的人編寫一本易懂的操作手冊， Tempress定義了以下用戶：Operator 操作人員The operator is handling the process from loading until unloading of the wafers. Therefore the operator needs to select a recipe, put the wafers on the boat, fill in Lot ID, Start the process, monitor the progress and unload wafers.操作人員的操作過程是從裝載硅片到卸載硅片。

9、但是操作人員需要選擇工藝菜單，裝載硅片，填寫產(chǎn)品批號，啟動工藝和監(jiān)控運(yùn)行過程及卸載硅片Process engineer 工藝工程師The process engineer is a qualified chemical engineer, who is responsible for the process recipes and their results. The process engineer writes, tests and releases new process recipes.工藝工程師是有資格的化學(xué)工程師，他負(fù)責(zé)工藝菜單和結(jié)果，需要編寫、測試和投放新的工藝菜單。Servic

10、e or Maintenance engineer 維修工程師The maintenance engineer is a qualified electrician or mechanic, who is responsible for a proper functioning system in accordance to its designated purpose. A Tempress qualified service engineer will perform the first installation.維修工程師是有資格的電工或技工，他要負(fù)責(zé)設(shè)備按設(shè)定的目的正常運(yùn)行。Tempr

11、ess的維修工程師會完成初始的安裝。Notes, Cautions and Warnings注意，小心，警告Notes, Cautions and Warnings appear throughout this manual, where extra attention is required to a particular (safety) item. Three levels can be distinguished:特別注意的地方會有特別提醒，注意，小心，警告要貫穿整個(gè)手冊，并分為三個(gè)等級：NOTE注意Notes alert to pay attention to items or pr

12、ocedures of special importance.注意是提醒特別重要的項(xiàng)目或程序CAUTION小心Cautions alert for a potentially hazardous situation that may result in minor or moderate injuries.Cautions can also alert for potential equipment and/or product damage.小心是提醒有潛在的危險(xiǎn)境況，會導(dǎo)致小的或中度的工傷。提醒有設(shè)備或產(chǎn)品的潛在損害。WARNING警告Warnings alert for conditio

13、ns that may result in permanent and/or lethal injuries.警告是提醒有永久或致命的傷害。Contents description 內(nèi)容簡介This manual is divided into the following sections and appendices: 手冊分為下面幾個(gè)部分和附錄Section 1 Introduction 簡介Provides an overview of the Tempress Systems Inc. Horizontal furnace.Tempress公司水平爐子的簡介Section 2 Safe

14、ty安全Describes the safety components and functions. It describes all measures that are required to provide a safe way of working.描述安全組分和作用。它描述為提供一個(gè)安全工作的所有措施。Section 3 Operator Instructions 操作說明Describes all procedures that are required for the operator.描述為操作員需要的所有規(guī)程Revision History 版本的歷史This manual i

15、s revision 1 of the Operator Manual and is intended to explain the required operator procedures. The function and screens it describes are based on the following software releases:說明操作程序的操作手冊是第一個(gè)版本，其中功能和屏幕的描述是基于以下軟件版本：? TSC 2 version 6.3 (17-02-2003)?For minor software and hardware changes, addendum

16、 to this manual will be available. For major changes, a new revision will be available. For information or other questions please contact Tempress Systems Inc.一些小的軟件和硬件的變化會加在附錄里。大的變化就會有一個(gè)新的版本。其他問題請聯(lián)系廠家。1.Introduction 簡介1.1 General 概要The horizontal furnaces of Tempress Systems Inc. are developed acco

17、rding to the European directives for Machinery (98/37/EC), Low Voltage (73/23/EC) and EMC (89/336/EEC).The Tempress Diffusion system is a modular horizontal furnace designed to process (silicon) wafers as part of the manufacturing technology of semiconductor, optical, MEMS and solar devices.公司的水平爐子是

18、依照 Machinery (98/37/EC), Low Voltage (73/23/EC) and EMC (89/336/EEC)的歐洲標(biāo)準(zhǔn)發(fā)展的。該公司的擴(kuò)散爐是為半導(dǎo)體、光學(xué)、 MEMS 和太陽能器件中的硅片處理工藝設(shè)計(jì)的有標(biāo)準(zhǔn)組件的水平爐子。Figure 1-1 shows an example of a standard L-shape diffusion system with 4 process tubes shown without the partition of a cleanroom wall. It is a right-handed system, defined

19、 according to the position of the furnace relative to an operator. Usually the system contains more than 1 tube. Based on the number and size of tubes, the system is referredto as a 2, 3 or 4 stack.Figure 1-1 is an example of a 4-stack system, allowing up to 4 different processes at any time. The tu

20、bes are numbered from 1 to 4, with tube number 1 at the top and tube 4 at the bottom. All tubes operate fully independently.圖 1-1是一個(gè)標(biāo)準(zhǔn)的 L型四管擴(kuò)散爐，沒有超凈間的隔離墻。對于操作人員來說是右手操作。一般系統(tǒng)不止一個(gè)爐管，基于爐管的數(shù)量，系統(tǒng)分為2、 3或 4管爐。圖 1-1是個(gè)四管爐，容許4個(gè)不同的工藝同時(shí)進(jìn)行。四個(gè)管的編號是1在頂部， 4在底部，所有的管是完全獨(dú)立的。Figure 1-1 Schematic view of a right-handed 4

21、-stack Diffusion System1.2 Operator area description 操作區(qū)介紹The operator area is limited to the loadstation only. Figure 1-2 shows the relevant items. The Loadstation part of a Tempress System should be placed in the cleanroom. The Furnace and Gas cabinet can optionally be placed in the greyroom.操作區(qū)只限

22、于裝載區(qū)，如圖1-2所示。裝載區(qū)必須置于千級間，爐體和氣柜置于萬級間。Buzzer/LEDLight/Fan SwitchTouchscreenEMOFigure 1-2 LoadstationTo load wafers, several loader types can be implemented, including the (default) inline loader, the Amtech Atmoscan?, and the backmounted softlander. To prevent particles on the wafers during the loading

23、 process, a constant horizontal laminar flow is created from the loadstation into the cleanroom.裝載硅片有幾種裝載類型，如聯(lián)機(jī)式、Amtech Atmoscan? 和 backmounted softlander類型，在裝片過程中為防止微粒落入硅片，千級間的裝載區(qū)要開啟水平的氣流吹掃。The loadstation is powered by 220V and has an illuminated On/Off switch for the fans and the lights.The remot

24、e control cabinet in the loadstation contains TFT-Touchscreens, one for each tube. These supply the user interface for communication with the Digital System Controllers(Digital Process Controller, Digital Temperature Controller and Digital Motion Controller).裝載區(qū)要有 220v的電源，以及風(fēng)扇和燈的照明開關(guān)。裝載區(qū)的遠(yuǎn)程控制箱包括每個(gè)管的

25、觸摸屏，它提供一個(gè)與數(shù)字控制系統(tǒng)交流的用戶界面。2.Safety 安全This section contains a brief description of the safety features of a Tempress HorizontalDiffusion System for the operator.Operators must have a general knowledge of the technology involved in diffusion systems.They should understand safety practices outlined in th

26、is manual.The descriptions contained in this user manual are general in nature or generic. The actual furnace may differ in minor detail from the furnace described in this manual, because of customer specific requirements or modifications. Please refer to the Tempress Safety manual for a complete de

27、scription of available safety features.這一部分是為操作者有關(guān)擴(kuò)散系統(tǒng)的安全裝置作一簡要說明。操作者必須了解擴(kuò)散工藝的基本常識，才能理解本手冊安全裝置的要點(diǎn)。用戶手冊中描寫的是一般性，實(shí)際上爐子和此有一些細(xì)微的差別，是因?yàn)榭蛻舻奶厥庑枰蚋?。安全裝置的完整描述請參考安全手冊。2.1 Emergency Off (EMO) 緊急關(guān)閉Emergency Off (EMO) buttons are located around the system at accessible locations according to EN 60204-1, especia

28、lly EN 418. Pressing an EMO button turns off all power to the system except to the fans on top of the furnace. This prevents fire hazard as a result of high heat concentration in the furnace cabinet. Also those parts that are connected to a UPS facility remain operational.按照 EN 60204-1, 尤其是 EN 418標(biāo)準(zhǔn)

29、，緊急關(guān)閉按鈕在系統(tǒng)中易接近的位置。按下緊急關(guān)閉按鈕將切斷除爐子頂部風(fēng)扇的其他電源，會防止由于爐子高溫引起的火災(zāi)。其他連有不間斷電源的部分會繼續(xù)運(yùn)行。Press the EMO button when a person is in danger, when there is a fire, a water leakor any other event that could be hazardous to life.當(dāng)著火，漏水或其他危害到生命的突發(fā)事件，要按EMO 按鈕2.2 Alarm Signals警報(bào)信號Alarms and alerts generated by tube contro

30、ls are presented in several ways:石英管引起的報(bào)警有下面幾種形式：? Buzzer / LED蜂鳴器 / LED? Touch screen 觸摸屏? Light tower 燈塔? TSC-IIVisible and audible alarm signals are generated by the DPC, DTC and the DMC. The visible signals will be presented with a LED, located below the buzzer position as shown in Figure1-2. Ea

31、ch tube process is represented by one LED and buzzer combination. DPC, DTC 和DMC 提供了可視聽報(bào)警信號， 可視信號是由 LED 實(shí)現(xiàn)的，如圖 1-2它位于蜂鳴器下方。每一個(gè)石英管都有一組對應(yīng)的 LED 和蜂鳴器。The visible alarm signals will be presented on the touchscreen bottom line. Alarms on the Touchscreen are always in combination with an audible signal. Tou

32、ching the screen deactivates the audible signal.A new Alarm or alert will not activate the audible signal again before current alarm has been solved.可視報(bào)警信號是在觸摸屏的底線，觸摸屏上的報(bào)警信號是于可聽信號相結(jié)合的，點(diǎn)擊觸摸屏可解除報(bào)警信號。當(dāng)前的報(bào)警情況沒有解決之前，新的報(bào)警情況不會激活可聽報(bào)警。Figure 2-1 Default light tower configurationAlarms generated by the DPC, D

33、TC and DMC will be made visible by three colors. Each color of the light tower represents particular circumstances.DPC, DTC和DMC 提供了三種顏色的報(bào)警信號，每種顏色代表特別的情況。- Green represents safe, operational condition.綠色代表安全，運(yùn)行環(huán)境- Yellow represents warnings and alerts黃色代表警告或警報(bào)- Red represents alarms紅色代表報(bào)警See section

34、2.3 for a full description.2.3節(jié)會詳細(xì)描述TSC 報(bào)警菜單Activating the alarm menu gives an overview of all active and passed alarms during theprocess. In case of an active alarm the“ Alarm ” button start flashing on and off.如果 “Alarm報(bào)”警按鈕開始閃爍，激活報(bào)警菜單會顯示工藝中過去和現(xiàn)在的報(bào)警情況。2.3 Light tower signal description (optional)燈

35、塔信號描述（可選）Two light towers, one on top of the loadstation in the cleanroom and one on top of the furnace in the greyroom, are installed for fast anticipation on the status of the (production) process. This section describes the function of each light and its relation to the tube status.兩個(gè)燈塔，一個(gè)在千級間裝載區(qū)

36、頂部，一個(gè)在萬級間爐子頂部，這樣安裝是為了快速反映工藝狀況。本部分描述每個(gè)燈的功能及對應(yīng)的管子狀況。Green綠Yellow黃Red紅A light tower is (default) comprised of 3 lights: from top to bottom RED, YELLOW andGREEN. 燈塔是由紅，黃，綠三個(gè)顏色組成：The green and red light can indicate 2 signals:綠和紅燈顯示兩種信號：亮或不亮1) OFF2) ONThe yellow light can indicate 2 signals: 黃燈顯示兩種信號：不亮或

37、閃爍1) OFF2) BLINKThe light tower is controlled by a tower signal PLC that receives its commands from the various controllers, among others DPC/DTC/DMC, Excess temperature controller, gas detection system alarm and the TSC Host control.燈塔是由 PLC信號塔控制，信號塔接收來自不同控制系統(tǒng)的命令，如DPC/DTC/DMC ，超溫控制，氣體檢測系統(tǒng)和TSC主機(jī)控制。I

38、n case the EMO-switch is activated or a power failure occurs for more than 4 seconds, the power supply to the furnace will stop and also the light tower will be off.The tower signal PLC is programmed by Tempress Systems Inc. and is not adjustable by customers.如果緊急關(guān)閉啟動或電源停止供電4秒以上，爐子電源將切斷，燈塔也會關(guān)掉。信號塔 P

39、LC的程序是由 Tempress公司編寫的，用戶不能改動。For a functional description of the light tower signals see table 1:燈塔的功能描述如表 1Signal 信號Mode 模式Description 描述屏幕開運(yùn)行沒有警告和信息關(guān)沒有運(yùn)行黃燈閃爍N2壓力開關(guān)沒有氮?dú)饬鲃訖z測空氣壓力開關(guān)沒有空氣流動檢測Torch溫度 (750)Torch溫度超過 750oCTorch 火焰中斷沒有火焰，H2閥門會關(guān)閉Torch H2/O2 比例H2/O2比超過安全值Torch 外殼Torch表面溫度太高電源組溫度傳感器電源組溫度太高源瓶溫度

40、源瓶溫度太高源瓶水平位置源的液面太低O2- 低氧氣流速太低排放 (低/高)排放氣流超出限制限度警報(bào) (如果工藝菜單實(shí)際值超出限制中有程序 )等待操作 (如果工藝菜單需要持續(xù)操作中有程序 )工藝完成舟手動Servo 成手動模式維護(hù)模式維護(hù)模式被激活關(guān)沒有警告或警報(bào)紅燈開超溫監(jiān)測器激活管子過熱泄漏檢測檢測到氣或水泄漏關(guān)沒有警告或警報(bào)沒有危險(xiǎn)Table 1 Light tower signal description2.4 Toxic Material 有毒材料The process engineer, responsible for all process related activities,

41、has to inform theoperator about the hazards of the process.工藝工程師要對全部及相關(guān)工藝過程負(fù)責(zé)，必須告知操作員工藝中存在的危險(xiǎn)。2.5 Safety measures 安全措施Safety measures are indicated in the appropriate procedures安全措施會在適當(dāng)?shù)某绦蛑兄赋觥?.Operator Instructions 操作說明This document describes the various procedures required for an operator. The pro

42、cedures describe how to load and unload wafers, how to select a new process recipe, how to start/continue a process recipe, how to stop the timer of a running process recipe, how to modify Variable Commands when available and how to abort a running process recipe.這一文件向操作者描述了不同的程序：如何裝卸硅片， 如何選擇一個(gè)新的工藝菜

43、單，如何開始或繼續(xù)工藝菜單，如何停止運(yùn)行的工藝計(jì)時(shí)，如需要怎樣修改可變參數(shù)，如何中斷一個(gè)正在運(yùn)行的工藝。3.1 Load or Unload process wafers裝卸硅片Loading and unloading process wafers on the paddle is required before and after each process run. 每一個(gè)工藝過程運(yùn)行之前和之后都要從槳上裝卸硅片。裝載硅片? Place the wafers on the wafer carriers, depending on the situation with (vacuum) tw

44、eezers or a wafer transfer system.用真空吸筆或硅片轉(zhuǎn)移裝置把硅片裝入硅片承載器。? Pick-up wafer carriers with a pick-up fork or automated loading tool.? Place the wafer carriers around the center of flatzone as indicated on the loadstation.用叉子或自動裝載工具提取硅片承載器放到裝載區(qū)的中心位置。卸載硅片CAUTION小心Wafers and paddle are hot. 硅片和槳是熱的。? Allow

45、 the wafers to cool down. 讓硅片降溫? Pick-up wafer carriers with a pick-up fork or automated loading tool. (Amtech Systems S300)? Remove the wafers from the wafer carriers, depending on the situation with (vacuum)tweezers or a wafer transfer system.用叉子或自動裝載工具提取硅片承載器。然后用真空吸筆或硅片轉(zhuǎn)移裝置把硅片從硅片承載器中取出。3.2 Select

46、ing a new process recipe選一個(gè)新的工藝菜單A new process recipe needs to be selected so the new instructions can be executed. A newprocess recipe can only be selected if the current process recipe is in Step 0要執(zhí)行新的指令需要選一個(gè)新的工藝菜單。只有當(dāng)現(xiàn)在工藝菜單處在的Step 0才可以選擇新的工藝菜單。觸摸屏1) return to the Main Menu by pressing ESC until the following screen appears: