CT擴(kuò)散爐培訓(xùn)教材(設(shè)備中英文版)

1、centrotherm擴(kuò)散爐設(shè)備培訓(xùn) equipment training of centrotherm Diffusion furnace 12021/8/14ALoading box 推舟部分B. TGA 有毒氣體排放C. Heating furnace 加熱部分D. Gas cabinet 氣柜22021/8/141、CMI電腦2、Loading box上料箱3、Toxic gases 有毒氣體排放4、Furnace 爐體 5、Gas box 氣源柜32021/8/14Baddle head舟頭Loading wafer加栽的硅片42021/8/14Mechanical arm 機(jī)械臂5

2、2021/8/14 Storage rack 1，2 存儲(chǔ)位1、2 Paddle bearing, adjustable paddle position 碳化硅槳支座，調(diào)節(jié)槳位置62021/8/14quartz door石英門Door cylinder爐門氣缸72021/8/141、CMS module 3、Power connection cover2、Thermocouple connection 4、Temperature sensor module 82021/8/141、 Flow meter 氣體流量計(jì)2、 Pneumatic valve 氣動(dòng)閥1292021/8/14Coolin

3、g to the top of the furnace body and furnace 對爐膛頂部和爐體進(jìn)行冷卻102021/8/14On the POCL3 constant temperature process, normal temperature 20 degrees對POCL3進(jìn)行恒溫作用，正常工藝溫度20度112021/8/14Bearing quartz and silicon, and out of the carrier ship承載石英舟和硅片石英舟進(jìn)出的載體122021/8/14Detection of a range of whether object, avoid

4、 hit boat phenomenon, this range can be adjusted檢測某個(gè)范圍內(nèi)是否有物體，避免出現(xiàn)撞舟現(xiàn)象，些范圍可進(jìn)行調(diào)節(jié)132021/8/14142021/8/14152021/8/141、Heat exchanger2、Cooling3、Shutoff valve 1、Cooling 4、Heat exchanger2、The main fan 5、Electronic devices 3、Cooling the air passage162021/8/14IndicatorIndicator lamp lampcolorcoloractionaction

5、meaningmeaninggreenopenReady to operatetwinklepauseblueopenUser interaction requiredyellowopenwarningredShines hom:offAlarmerror172021/8/141operation panel 4 keyboard2Touch screen 5 touch screen button 3USB socket182021/8/14The equipment has the following button1Stop action -All the mechanical actio

6、n of loading box are stop2Loading box lighting-openclose the lamp of the loading box3Autohand manual switch-Loading and unloading of the operating system can manual operation in an open feeding box4 Allows to unlock- Press this button ,to unlock the car192021/8/141 pushbutton ABC keyboard call 4 pus

7、hbutton right mouse button2Pushbutton task change 5 pushbutton shift3Pushbutton brightnessABC keyboard call-calls upclosses the keyboard on the touchscreen, keyboard entries can be carried out directly on the touchsceen.Pushbutton task change-changes a task windowsPushbutton brightness-press this bu

8、tton together with the shife button to increase the brightness of the touchscress.Pushbutton right mouse buttonopens right mouse button context menu,press this button together with the shift button to reduce the touchscreen.Pushbutton shiftcalls up the second keyboard level,push this bushbutton toge

9、ther with the required function button.202021/8/141System name 7 alarm close 2Date time 8 notes3Centrotherm logo and system 9 additional information Information button4Current display area in the 10 system mode Information field 11 connection state with CECGEM5System status6Loginlogout button212021/

10、8/141 Jobs 4 setup2 System 5 alarms3 Datslog 6 help(online help)222021/8/141Title bar 3 navigation bar2Command bar 4 information field with variable field areas 232021/8/14上圖是CESAR的界面：1.系統(tǒng)工藝狀態(tài) 2.工藝時(shí)間狀態(tài) 3.時(shí)間日期 4.氣體流量狀態(tài) 5.系統(tǒng)準(zhǔn)備狀態(tài) 6. 溫度檢測顯示This is a CESAR interface：1. System process 2. Process time 3. T

11、ime and date 4. Gas flow state 5. System readiness 6. Temperature detection and display242021/8/141.SLS1.SLS處處于于“UPUP”位置位置時(shí)時(shí)，管，管內(nèi)內(nèi)有舟有舟時(shí)時(shí)不可手不可手動(dòng)進(jìn)槳?jiǎng)舆M(jìn)槳 SLS in the UP position, the inner tube has a boat can not be manually into the paddle.2.SLS2.SLS處處于于“DOWNDOWN”位置位置時(shí)時(shí)，槳槳上有舟上有舟時(shí)時(shí)不得手不得手動(dòng)進(jìn)動(dòng)進(jìn)舟。舟。 SLS in th

12、e DOWN position, the paddle is not manually into the boat boat.3.3.槳槳上有舟上有舟時(shí)時(shí)，舟不在正確位置，不準(zhǔn)切，舟不在正確位置，不準(zhǔn)切換換到自到自動(dòng)運(yùn)動(dòng)運(yùn)行行模式。模式。 Oars on a boat, the boat is not in the correct position, are not allowed to switch to automatic running mode. 252021/8/144.4.進(jìn)進(jìn)舟、退舟失舟、退舟失敗報(bào)敗報(bào)警警時(shí)時(shí)，一定要，一定要檢查檢查舟的位置舟的位置 是否在合理的位置，才可以是否

13、在合理的位置，才可以對報(bào)對報(bào)警警進(jìn)進(jìn)行行復(fù)復(fù)位，自位，自動(dòng)動(dòng)/ /手手動(dòng)動(dòng)的切的切換換要要謹(jǐn)慎謹(jǐn)慎，若舟不在正確位置，若舟不在正確位置，請請手手動(dòng)動(dòng)移至正確位置后再移至正確位置后再對報(bào)對報(bào)警警進(jìn)進(jìn)行行復(fù)復(fù)位（位（爐門爐門以以槳槳的位置作的位置作為開閉標(biāo)為開閉標(biāo)準(zhǔn)）準(zhǔn)） Into the boat, boat back failure alarm, be sure to check the boat position is in a reasonable position, can alarm reset, automatic / manual switch must be careful, i

14、f the ship is not in the correct position, please manually moved to the correct position after the alarm reset ( door to paddle position as opening and closing standard )262021/8/145.舟位于存儲(chǔ)架（storage2,3）時(shí)，一定要確認(rèn)存儲(chǔ)架上 的感應(yīng)器有沒有感應(yīng)到，否則有可能導(dǎo)致撞舟。 When the boat is located on the storage rack (storage2, 3),make s

15、ure that the storage rack sensor is sensed, otherwise may cause the bumped boat.6.從手動(dòng)切換自動(dòng)時(shí)，Grip一定要在Middle位置， 否則機(jī)械臂可能因無法正常運(yùn)行而報(bào)警。 From manual automatic, Grip must be in the Middle position, or mechanical arm may be due to normal operation and alarm.272021/8/147.進(jìn)舟后，工藝無法運(yùn)行，先確認(rèn)舟在槳上的位置，以及 Tube=ready SLS=

16、UP TGA=YES 然后進(jìn)行操作。 In the boat, technology cannot run, make sure the boat on the oar position, as well as Tube = ready SLS = UP TGA = YES then operation.8.機(jī)械臂運(yùn)動(dòng)時(shí)不要上料，以免上料時(shí)抖動(dòng)機(jī)械臂撞到舟。As mechanical arm movement not feeding,in order to avoid feeding time jitter mechanical arm hit the boat。9.單一爐管有故障時(shí)，應(yīng)該及時(shí)

17、瑣閉并降溫，以節(jié)約能源。Single tube has fault, should be timely and closed and cooling, in order to save energy.282021/8/141. Process recipe has terminated with error state AC 進(jìn)行中的工藝以錯(cuò)誤狀態(tài)結(jié) 束警報(bào)確認(rèn)To store 儲(chǔ)存To store enable unload 儲(chǔ)存并缷下Restart recipe重新開始工藝A用于選錯(cuò)工藝號，手動(dòng)結(jié)束工藝， 重新開始新的其他工藝時(shí)進(jìn)行選擇B多數(shù)情況下選擇此項(xiàng)C工藝中斷需要重新進(jìn)行時(shí)選擇，但不

18、建議使用， 建議選擇（B）Process recipe has terminated with error state AC Ongoing process to end the error status Alarm confirmation To store To store enable unload Restart recipe A Used the wrong process number ， Hand end of the process ， Start a new choice when other processes B In most cases, choice this on

19、e C Interrupts need to re-process the selection, but not recommended, recommended to choose (B) 。292021/8/142. Boat already in tube- Select:Process=0. Unload=1(.) 選擇0或1 說明：當(dāng)管內(nèi)有舟存在時(shí)，異常排除 后手動(dòng)運(yùn)行工藝時(shí)會(huì)出現(xiàn)此提示 Boat already in tube- Select:Process=0. Unload=1(.) Description: When the tube has a boat there, th

20、e exception rule out runningprocess manually after this prompt will appear.302021/8/143.Lost homing check poti 失去引導(dǎo)，檢 查位置（一般此警報(bào)會(huì)自動(dòng)解除） 說明：此警報(bào)會(huì)自動(dòng)解除，但需要 檢查一下槳是否在原點(diǎn)位置即可 Lost homing check poti Check the location (usually the alarm will be automatically lifted) Description: This alarm will be automaticall

21、y lifted, but need Check whether the origin location to paddle312021/8/144. Recipe abort 2-process abort to continue : enter AB 工藝退出運(yùn)行終止！繼續(xù)，請輸入AB 說明：對工藝異常結(jié)束的手動(dòng)確認(rèn)，然后就會(huì)出現(xiàn)報(bào)警 Recipe abort 2-process abort to continue : enter AB Description: The manual confirmation process ends, 5. Recipe couldnt be start

22、ed please check protocol for reason! 工藝不能運(yùn)行，請檢查原因 Recipe couldnt be started please check protocol for reason! 322021/8/14. 6. Boat sensor of grad has changed without permission 機(jī)械手上的傳感器被非允許的改動(dòng) 說明：機(jī)械臂在上下移動(dòng)的時(shí)候，前后不能移動(dòng)， 若前后位置發(fā)生移動(dòng)機(jī)械將被鎖定，出現(xiàn)報(bào)警， 此報(bào)警需設(shè)備人員的密碼登陸在Handing 對話框中的Tech模式下進(jìn)行復(fù)位Boat sensor of grad has

23、changed without permission Description: The robotic arm to move up and down when you can notmove around,if the location is moved around the machine will be locked, an alarm, the alarmequipment, personnel need to log in a password dialog box in the Tech Handingreset mode332021/8/14 7.There is already an active recipe 工藝名 from local tisting 已有工藝在此管的工藝列表中 說明：這兩個(gè)報(bào)警經(jīng)常出現(xiàn)，若能夠確認(rèn)此管未有 工藝在運(yùn)行，就必須將此管重新啟動(dòng)， 如果有工藝運(yùn)行，可以將工藝手動(dòng)停止， 或者等待工藝結(jié)束。 There is already an active recipe from local tisting Description: This two alarms are frequent, if not ab